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AgTaO3的分子束外延生长

Molecular Beam Epitaxy of AgTaO3

Tobias Schwaigert, Joshua Maile, Olivia Peek, Eric Biedke, Paul T. Malinowski, Kyle M. Shen, Salva Salmani-Rezaie, Darrell G. Schlom, Kaveh Ahadi

arXiv 2609.30229首次发表:更新:

发表机构

Cornell University; Ohio State University(康奈尔大学; 俄亥俄州立大学)

机构由 AI 辅助整理,请以论文原文为准。

AI 中文总结

本文通过分子束外延首次合成单晶AgTaO3薄膜,在SrTiO3衬底上实现高质量外延生长,为银基钽酸盐的应变工程和界面性质研究提供平台。

AI 中文摘要

我们报道了利用分子束外延(MBE)首次合成单晶AgTaO3薄膜。在臭氧/氧气气氛(80% O3 + 20% O2)下,通过顺序沉积原子银和TaO2层,在(001)和(111)取向的SrTiO3衬底上生长了高质量的外延AgTaO3薄膜。X射线衍射和倒易空间映射表明,薄膜与SrTiO3衬底相干应变,其摇摆曲线锐利度与衬底相当,表明结构完整性高。高角环形暗场扫描透射电子显微镜(HAADF-STEM)证实了(001)pc取向薄膜的相干、低缺陷生长。对于(111)pc取向薄膜,初始相干生长可持续至10 nm,之后过渡为富Ta表面区域。能量色散X射线光谱(EDX)显示,两种取向在衬底界面处均存在窄的阳离子互混区域。这项工作展示了单晶AgTaO3薄膜的有效合成路线,为研究银基钽酸盐中的应变工程和新兴界面性质提供了平台。

英文摘要

We report the first synthesis of single-crystal AgTaO3 thin films using molecular-beam epitaxy (MBE). High-quality epitaxial AgTaO3 films were grown on both (001)- and (111)-oriented SrTiO3 substrates using sequential deposition of atomic silver and TaO2 layers under an ozone/oxygen atmosphere (80 % O3 + 20 % O2). X-ray diffrac- tion and reciprocal space mapping demonstrate that the films are coherently strained to the SrTiO3 substrates with sharp rocking curves comparable to the substrates, indicating high structural perfection. High-angle annular dark-field scanning trans- mission electron microscopy (HAADF-STEM) confirms coherent, low defect growth for (001)pc-oriented films. For (111)pc-oriented films, initial coherent growth proceeds up to 10 nm before transitioning into a Ta-rich surface region. Energy-dispersive X-ray spectroscopy (EDX) reveals a narrow cation intermixing region at the sub- strate interface for both orientations. This work demonstrates an effective synthesis route for single-crystal AgTaO3 thin films, providing a platform to investigate strain engineering and emergent interfacial properties in silver-based tantalates.

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