发表机构
Joint Institute for Nuclear Research; Flerov Laboratory of Nuclear Reactions（俄罗斯联合核子研究所; 弗廖罗夫核反应实验室）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
针对ECR离子源中钛蒸气压低导致离子束产生困难的问题，本文提出利用氟化钛或钛与SF6反应原位生成氟化物注入等离子体，实现高效稳定钛离子束产生。
AI 中文摘要
多电荷钛离子的产生对于基于加速器的实验、表面改性技术以及核物理应用具有重要意义。由于钛在低于1000°C的温度下饱和蒸气压较低，从电子回旋共振离子源（ECRIS）产生钛离子束仍然是一项具有挑战性的任务。将钛蒸气注入ECR等离子体的方法选择，对于实现高电离效率、等离子体稳定性以及源长期可靠运行起着关键作用。在本工作中，研究了将中性钛原子注入ECR等离子体的替代方法，重点集中在使用含氟化合物上。氟化钛（TiF3、TiF4）在中等温度下具有相对较高的饱和蒸气压，从而可以使用标准电阻加热炉（工作温度最高可达1000°C）。另一种方法涉及通过金属钛与六氟化硫（SF6）解离产物之间的化学反应，在等离子体腔内原位形成氟化钛。这些方法能够实现可控且高效的钛注入ECRIS等离子体，并具有令人满意的提取离子束稳定性。
英文摘要
The production of multiply charged titanium ions is of significant interest for accelerator-based experiments, surface modification technologies, and applications in nuclear physics. Due to the low saturated vapor pressure of titanium at temperatures below 1000 °C, the generation of titanium ion beams from an electron cyclotron resonance ion source (ECRIS) remains a challenging task. The choice of titanium vapor injection methods into the ECR plasma plays a key role in achieving high ionization efficiency, plasma stability, and reliable long-term source operation. In this work, alternative approaches for the injection of neutral titanium atoms into the ECR plasma are investigated, focusing on the use of fluorine-containing compounds. Titanium fluorides (TiF3, TiF4) possess a relatively high saturated vapor pressure at moderate temperatures, allowing to use standard resistively heated ovens operating up to 1000 °C. Another method involves the in-situ formation of titanium fluorides inside the plasma chamber via chemical reactions between metal titanium and the dissociation products of sulfur hexafluoride (SF6). These approaches enable controlled and efficient titanium injection into the ECRIS plasma with satisfactory extracted ion beam stability.
