AI 中文总结
本文提出一种利用同一纳米掩模实现碳化硅色心注入与纳米柱制备的可扩展方法，显著提高光子收集效率并保持自旋相干性，适用于多种固态平台。
AI 中文摘要
碳化硅中的色心是量子技术的一个有前景的平台，提供了用于存储和操纵量子信息的长相干电子和核自旋，以及用于量子通信的单光子发射。低光子收集效率通常通过将色心集成到纳米光子器件中来解决。在这里，我们报告了一种可扩展的方法，用于将色心确定性集成到碳化硅纳米柱中，使用相同的纳米尺度掩模进行氧相关色心（PL5、PL6）的注入和后续通过干法刻蚀的纳米柱制造。该方法解决了纳米结构中色心产生率低的问题，其品质因数与块体样品相当。我们展示了PL5的计数率增强高达一个数量级，PL6的计数率增强高达四倍，同时保持了自旋相干时间。我们的方法直接适用于其他固态平台，为将色心高效集成到纳米结构中提供了一条可扩展的途径。
英文摘要
Color centers in silicon carbide are a promising platform for quantum technologies, offering long-coherence electron and nuclear spins for storing and manipulating quantum information, as well as single-photon emission for quantum communication. Low photon collection efficiency is commonly addressed by integrating color centers into nanophotonic devices. Here, we report a scalable method for the deterministic integration of color centers into silicon carbide nanopillars, using the same nanoscale mask for both implantation of oxygen-related color centers (PL5, PL6) and subsequent nanopillar fabrication via dry etching. This approach solves the issue of low color center creation yield in nanostructures, with figures of merit comparable to bulk samples. We demonstrate count rate enhancements of up to one order of magnitude for PL5 and four times for PL6, while preserving spin coherence times. Our method is directly applicable to other solid-state platforms, offering a scalable route to efficiently integrate color centers into nanostructures.
