发表机构
The University of Tokyo; National Institute of Advanced Industrial Science and Technology (AIST); Tohoku University（东京大学; 产业技术综合研究所; 东北大学）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本研究提出基于InGaAsP/Si混合MOS移相器的可编程光子电路，实现超低功耗、高速、高效率调制，并集成到马赫-曾德尔网格中，为大规模可编程光子计算奠定基础。
AI 中文摘要
可编程光子电路已成为从光通信到人工智能计算和量子信息处理等应用的有前景的平台，但其扩展从根本上受到其基本构建模块——光学移相器的限制。现有的移相器技术在功耗、工作速度、调制效率、光学损耗和热串扰之间面临固有的权衡，使得实现高性能、大规模可编程光子电路具有挑战性。在这里，我们提出了一种基于InGaAsP/Si混合金属-氧化物-半导体（MOS）移相器的可编程光子电路，该电路结合了超低功耗、高速运行、高调制效率、低光学损耗和可忽略的热串扰。这些移相器结合了MOS电容器的低泄漏电流与InGaAsP薄膜的强载流子诱导折射率调制，实现了低于30 fW/π的静态功耗、555 ps的开关时间、0.13 Vcm的相位调制效率（VπL）以及仅0.20 dB/π的载流子诱导额外插入损耗。我们将这些移相器集成到可编程马赫-曾德尔干涉仪网格中，并演示了光开关和可编程酉变换，同时在整个集成移相器中保持飞瓦级静态功耗。我们进一步展示了具有可忽略热串扰的电路级操作，解决了密集集成可编程光子电路的主要障碍。这些结果为下一代信号处理和计算的可扩展、高性能可编程光子系统奠定了基础。
英文摘要
Programmable photonic circuits have emerged as a promising platform for applications ranging from optical communications to artificial-intelligence computing and quantum information processing, but their scaling is fundamentally constrained by their essential building block, the optical phase shifter. Existing phase-shifter technologies face inherent trade-offs among power consumption, operating speed, modulation efficiency, optical loss, and thermal crosstalk, making it challenging to realize high-performance, large-scale programmable photonic circuits. Here, we present a programmable photonic circuit based on InGaAsP/Si hybrid metal-oxide-semiconductor (MOS) phase shifters that combines ultralow power consumption, high-speed operation, high modulation efficiency, low optical loss and negligible thermal crosstalk. The phase shifters combine the low leakage current of a MOS capacitor with the strong carrier-induced refractive-index modulation of an InGaAsP membrane, achieving a static power consumption below 30 fW/$π$, a switching time of 555 ps, a phase-modulation efficiency ($V_πL$) of 0.13 Vcm and a carrier-induced excess insertion loss of only 0.20 dB/$π$. We integrate these phase shifters into a programmable Mach-Zehnder interferometer mesh and demonstrate optical switching and programmable unitary transformations, while maintaining femtowatt-level static power consumption across integrated phase shifters. We further demonstrate circuit-level operation with negligible thermal crosstalk, addressing a major obstacle to densely integrated programmable photonic circuits. These results establish a foundation for scalable, high-performance programmable photonic systems for next-generation signal processing and computation.
