发表机构
Department of Electrical and Computer Engineering, The University of Texas at Austin（德克萨斯大学奥斯汀分校电气与计算机工程系）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本文设计了一种基于光子波导干涉仪的光机械麦克风，通过解析评估其转导机制与性能指标，指出其在常规应用中无显著优势，但适用于高温等恶劣环境。
AI 中文摘要
我们提出了一种基于隔膜集成光子波导马赫-曾德尔干涉仪的光机械麦克风。声压使MEMS隔膜变形，在传感波导中引起应变并改变其光学路径长度。我们解析地评估了光学和机械转导机制以及关键性能指标，包括信噪比、动态范围、声学过载压力和最小可检测压力。我们考虑了两种设计案例：一种MEMS麦克风和一种测量麦克风。结果表明，在常规应用中，其性能具有竞争力，但相对于最先进的麦克风并无实质性总体优势。然而，该架构可能为高温和其他恶劣环境传感应用提供优势。
英文摘要
We present an optomechanical microphone based on a diaphragm-integrated photonic waveguide Mach-Zehnder interferometer. Acoustic pressure deforms the MEMS diaphragm, inducing strain in the sensing waveguide and changing its optical path length. We analytically evaluate the optical and mechanical transduction mechanisms and key figures of merit, including signal-to-noise ratio, dynamic range, acoustic overload pressure, and minimum detectable pressure. Two design cases are considered: a MEMS microphone and a measurement microphone. The results indicate competitive performance but no substantial overall advantage over state-of-the-art microphones in conventional applications. The architecture may nevertheless offer advantages for high-temperature and other harsh-environment sensing applications.
Comments16 pages, 12 figures, 1 table
