面向Ku波段的AlScN-on-Diamond声表面波延迟线：相位速度与群速度解耦
Toward Ku-Band Surface Acoustic Wave Delay Lines on AlScN-on-Diamond with Decoupled Phase and Group Velocities
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中文总结 AI 辅助
本文报道了AlScN-on-Diamond声表面波延迟线，利用Sezawa分支解耦相位与群速度，实现X至Ku波段工作，频率比蓝宝石衬底高1.5倍。
中文摘要 AI 辅助
本工作报告了在金刚石基铝钪氮（AlScN）平台上制备的声表面波（SAW）声学延迟线（ADLs），其工作频段覆盖X波段并接近Ku波段。AlScN薄膜与金刚石衬底之间巨大的声速差异产生了强色散的Sezawa分支，该分支将相位速度与群速度解耦。波长为1 μm的延迟线在9.55 GHz处显示出Sezawa通带，分数带宽为1.05%，每波长传播损耗为0.094 dB，传播限制品质因数为465，群速度为5979 m/s；而共同制备的谐振器给出的相位速度为9560 m/s，两者之比约为1.6。将波长缩小至0.5 μm后，通带移至16.5 GHz，分数带宽为0.7%。因此，在相同光刻节距下，该平台的最高工作频率比AlScN-on-sapphire平台高出约1.5倍，同时保持了单位长度的群延迟。
英文摘要
This work reports surface acoustic wave (SAW) acoustic delay lines (ADLs) on an aluminum scandium nitride (AlScN) on diamond platform operating in the X band and approaching the Ku band. The large acoustic-velocity contrast between the AlScN film and the diamond substrate produces a strongly dispersive Sezawa branch that decouples the phase velocity from the group velocity. Delay lines with a 1 $μ$m wavelength show a Sezawa passband at 9.55 GHz with a fractional bandwidth of 1.05%, a propagation loss of 0.094 dB per wavelength, a propagation-limited quality factor of 465, and a group velocity of 5979 m/s, while co-fabricated resonators give a phase velocity of 9560 m/s, a ratio of about 1.6. Scaling the wavelength to 0.5 $μ$m moves the passband to 16.5 GHz with a fractional bandwidth of 0.7%. The platform therefore reaches an operating frequency about 1.5 times higher than AlScN on sapphire at the same lithographic pitch while preserving group delay per unit length.
发表机构
- The University of Texas at Austin（德克萨斯大学奥斯汀分校）
- Northeastern University（东北大学）
机构由 AI 辅助整理，请以论文原文为准。
