一种安装在传递杆上的可旋转样品架，实现用于离子束铣削、斜角磁控溅射和共溅射的紧凑模块化真空系统
A transfer-rod-mounted rotatable sample holder enabling a compact modular vacuum system for ion-beam milling, oblique magnetron sputtering, and co-sputtering
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中文总结 AI 辅助
提出一种直接安装在传递杆上的多功能样品架，实现紧凑模块化真空系统中的离子束铣削、斜角溅射和共溅射，并通过Ta/CoFeB各向异性薄膜及Au-Ag系列验证其功能。
中文摘要 AI 辅助
我们提出了一种用于紧凑型研究级真空系统的新型多功能样品架概念。样品架直接安装在传递杆上，并在装载、传递、沉积和离子束铣削过程中始终与其保持机械连接。与传统布局不同，无需将样品移交至单独的基片台。通过结合轴向传递运动、绕传递杆轴旋转以及独立的基片旋转，样品架自身定义了相关的工艺几何结构，并支持标准沉积、可自由选择入射角的斜角沉积、基片旋转以及来自相邻溅射源的共溅射。集成在样品架中的屏蔽板同时充当基片挡板和源屏蔽。这减少了对单独挡板机构的需求，并允许四个2英寸磁控溅射源以紧凑的径向排列方式布置，无需源倾斜机构。该概念在一个由标准DN100CF组件组装而成的模块化真空系统中实现，该系统结合了负载锁、磁控溅射和离子束铣削。系统在不进行烘烤的情况下达到$5 \cdot 10^{-8}\\,\mathrm{mbar}$的基础压力。通过Ta/CoFeB双层膜的斜角沉积验证了样品架概念的功能，该双层膜表现出显著的单轴面内磁各向异性，并通过Au-Ag成分系列的共溅射验证，其电阻率遵循预期的Nordheim型成分依赖性。
英文摘要
We present a novel multifunctional sample-holder concept for compact research-scale vacuum systems. The sample holder is mounted directly on the transfer rod and remains mechanically connected to it throughout loading, transfer, deposition, and ion-beam milling. In contrast to conventional layouts, no handover to a separate substrate stage is required. By combining axial transfer motion, rotation around the transfer-rod axis, and independent substrate rotation, the holder itself defines the relevant process geometries and enables standard deposition, oblique deposition at freely selectable incidence angles, substrate rotation, and co-sputtering from adjacent sources. A shielding plate integrated into the sample holder acts as both a substrate shutter and a source shield. This reduces the need for separate shutter mechanisms and allows a compact radial arrangement of four 2-inch magnetron sputter sources without source-tilting mechanisms. The concept was implemented in a modular vacuum system assembled from standard DN100CF components, combining a load lock, magnetron sputtering, and ion-beam milling. The system reaches a base pressure of $5 \cdot 10^{-8}\,\mathrm{mbar}$ without bakeout. The functionality of the sample-holder concept is validated by oblique deposition of Ta/CoFeB bilayers, which exhibit pronounced uniaxial in-plane magnetic anisotropy, and by co-sputtering of an Au--Ag composition series, whose resistivity follows the expected Nordheim-type composition dependence.
发表机构
- Technical University of Darmstadt（达姆施塔特工业大学）
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