像素间距150微米的1024像素单光子计数微波动力学电感探测器阵列的制造后修整
Post-fabrication trimming of a 1024-pixel, single-photon counting, Microwave Kinetic Inductance Detector array with a pixel pitch of 150 micron
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中文总结 AI 辅助
针对紧密排列的微波动力学电感探测器阵列，提出制造后修整方法，将频率散布降低两个数量级，良率从76%提升至94%。
中文摘要 AI 辅助
微波动力学电感探测器是超导谐振器，能够在可见光和近红外波长下进行单光子计数并具备能量分辨能力。其零读出噪声、极低的暗计数以及与频分复用技术的兼容性使其非常适合大型成像阵列。这些阵列的探测器良率通常受限于制造引起的频率散布，导致谐振器碰撞。我们发现像素的紧密排列也会增加显著的频率散布。我们开发了一种适用于像素间距为$150\\ \mathrm{\mu m}$的紧密排列阵列的制造后修正方法。我们在一个复用单个倍频程读出带宽的1024像素阵列上演示了该方法，并显示频率散布从$1.1\times 10^{-2}$降至$3.5\times 10^{-4}$，良率从$76\\%$提升至$94\\%$。
英文摘要
Microwave Kinetic Inductance Detectors are superconducting resonators capable of single-photon counting with energy resolving capability at visible and near-infrared wavelengths. Their zero read noise, extremely low dark counts, and compatibility with frequency-division multiplexing make them well suited for large imaging arrays. The detector yield of these arrays is often limited by the fabrication-induced frequency scatter leading to resonator collisions. We find that the tight packing of the pixels can add significant frequency scatter as well. We developed a post-fabrication correction method that is suitable for tightly packed arrays with a pixel pitch of $150\ \mathrm{μm}$. We demonstrate this method on a 1024-pixel array multiplexed on a single octave of readout bandwidth and show a reduction in frequency scatter from $1.1\times 10^{-2}$ to $3.5\times 10^{-4}$ and an increase in yield from $76\%$ to $94\%$.
发表机构
- Space Research Organisation Netherlands (SRON)（荷兰空间研究所）
- Delft University of Technology（代尔夫特理工大学）
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