发表机构
Westlake University; Westlake Institute for Optoelectronics; Moldnano (Hangzhou) Technology Co., Ltd.（西湖大学; 西湖光电子研究院; 模纳（杭州）科技有限公司）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本文提出一种0.35毫米厚、1.98克重的碳化硅衍射波导，采用双参数变迹光栅和纳米压印兼容工艺，实现30度视场全彩显示与92%透过率，为超轻增强现实眼镜提供可扩展方案。
AI 中文摘要
增强现实眼镜提供了一种变革性的界面，有望重塑人类信息交互方式。在此背景下，碳化硅（SiC）凭借其高折射率和优异的热导率，为衍射波导提供了独特优势。然而，在单层全彩显示中，现有碳化硅波导的厚度通常保持在0.5毫米以上，以减少全内反射的弹跳次数，从而避免亮度和颜色的严重空间变化。在此，我们展示了一种厚度仅为0.35毫米、重量仅1.98克的超轻碳化硅衍射波导。通过采用深度和占空比连续变化的双参数变迹光栅，解决了空间不均匀性的挑战，实现了对局部衍射效率的精细空间控制。为了实现高通量生产，我们引入了一种与纳米压印光刻兼容的并行梯度转移方法，可在8英寸碳化硅晶圆上实现四个透镜对的晶圆级图案化。此外，氟化镁平坦化抑制了光栅可见性，并实现了92%的高透视透过率。光学模拟证实，该架构在30度视场范围内实现了平衡的全彩传输。该策略为超轻且视觉上不显眼的眼镜提供了一条可扩展的路径，为实用的消费级可穿戴显示器开辟了新的机遇。
英文摘要
Augmented reality eyewear offers a transformative interface poised to reshape human information interaction. In this context, silicon carbide (SiC) offers unique advantages for diffractive waveguides with its high refractive index and excellent thermal conductivity. However, in single-layer full-color displays, existing SiC waveguides generally remain thicker than 0.5 mm to reduce the bounce count of total internal reflection, thereby avoiding severe spatial variations in luminance and color. Here, we demonstrate a 0.35 mm SiC diffractive waveguide with an ultra-lightweight of only 1.98 g. The challenge of spatial non-uniformity is addressed by dual-parameter apodized gratings with continuously varying depth and duty cycle, enabling fine spatial control over local diffraction efficiency. To realize high-throughput production, a parallel gradient transfer method compatible with nanoimprint lithography is introduced, enabling wafer-scale patterning of four lens pairs per 8-inch SiC wafer. Furthermore, magnesium fluoride planarization suppresses grating visibility and achieves a high see-through transmittance of 92%. Optical simulations confirm that this architecture achieves balanced full-color transmission across a 30-degree field of view. This strategy provides a scalable route toward ultra-light and visually unobtrusive glasses, opening new opportunities for practical consumer-grade wearable displays.
