发表机构
School of Integrated Circuits, Peking University（北京大学集成电路学院）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本研究通过DTCO框架系统评估CFET中通过有源区漏极合并（DMtA）技术，发现其相比传统DMtF可提升RO频率11.7%，并借助有源区加宽和面积借用使内核频率提升34.8%，同时实现Hyper-cells、降低功耗5.3%并减少面积25.7%。
AI 中文摘要
漏极合并（DM）是一种在互补场效应晶体管（CFET）中垂直连接堆叠的n/pFET公共源/漏端子的超级通孔，它阻碍了进一步的寄生优化和单元缩放。本研究首次通过一个全面的DTCO框架，系统性地研究了最先进的通过有源区漏极合并（DMtA）技术——该技术最近被报道，将DM嵌入有源区，涵盖工艺集成、依赖接触配置的（CTCD）紧凑建模、标准单元设计、环形振荡器（RO）评估以及基于32位RISC-V Ibex内核的模块级PPA基准测试。通过减少DM寄生效应并实现DM宽度优化，DMtA相较于传统的通过场区漏极合并（DMtF）技术，将RO频率提高了11.7%。有源区加宽和面积借用（后者首次在文献[8]中报道，利用相邻单元中的空间余量进一步扩大纳米片宽度WNS）使Ibex内核最大频率提升了高达34.8%。更重要的是，DMtA通过合并相邻单元行间的有源区，使得曾经仅限GAA的Hyper-cells能够在CFET上实现，进一步带来8.7%的频率增益。一种布线后浮空输出引脚感知优化进一步移除了冗余的源/漏接触（CT），功耗降低了5.3%。最后，DMtA通过保持单行单元兼容性，促进了更具面积效率的2.5T单元缩放，使布线后内核面积减少了25.7%。
英文摘要
Drain merge (DM), a super via vertically connecting the common S/D terminals of stacked n/pFETs in Complementary FETs (CFETs), blocks further parasitic optimization and cell scaling. For the first time, this work systematically investigates the state-of-the-art Drain Merge through Active (DMtA), a revolutionary technology reported recently with the DM embedded in the active region, through a comprehensive DTCO framework spanning process integration, contact-configuration-dependent (CTCD) compact modeling, standardcell design, RO evaluation and block-level PPA benchmark on a 32-bit RISC-V Ibex core. By reducing DM parasitics and enabling DM-width optimization, DMtA improves RO frequency by 11.7% over its conventional Drain Merge through field (DMtF) counterpart. Active widening and Area Borrowing, the latter first reported in [8] and exploiting spatial slack in adjacent cells to further enlarge the nanosheet width (WNS), increase the maximum Ibex-core frequency by up to 34.8%. More importantly, DMtA also enables the once GAA-exclusive Hyper-cells on CFETs by merging the active regions across adjacent cell rows, providing a further 8.7% frequency gain. A post-routing floating-output-pin-aware optimization further removes redundant S/D contacts (CTs) and reduces power by 5.3%. Finally, DMtA facilitates more area-efficient 2.5T cell scaling by preserving single-row cell compatibility, reducing post-PR core area by 25.7%.
