模块化且经济高效的扫描光电流显微镜系统，用于二维光电器件的亚微米表征
Modular and Cost-effective Scanning Photocurrent Microscopy System for Sub-micron characterization of 2D optoelectronic devices
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- Northwestern Polytechnical University（西北工业大学）
- Ministry of Industry and Information Technology（工业和信息化部）
- Università di Roma “La Sapienza”（罗马第一大学）
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中文总结 AI 辅助
本文介绍一种基于改造金相显微镜的模块化、低成本扫描光电流显微镜系统，实现亚微米分辨率的二维器件光电子表征，并验证了其可靠性与普适性。
中文摘要 AI 辅助
扫描光电流显微镜（SPCM）是一种用于探测二维半导体器件中局部光电子现象的强大技术。然而，商业系统成本高昂、结构复杂，且往往缺乏灵活性和适应性。在本工作中，我们展示了一个自制的SPCM平台，该平台基于对传统金相显微镜的改造，通过将其与不同的光源（单模光纤耦合激光器和多模光纤耦合高功率LED）、电动XY载物台、数字相机和电子读出模块耦合而成。该系统能够同时采集光电流和反射强度图，且只需对显微镜进行最小程度的修改。我们通过将光电流图与反射图、光学显微照片以及在不同材料（InSe、MoS2、WSe2、Gr）和不同基底（Si/SiO2、光盘）上制造的器件上的原子力显微镜（AFM）形貌数据进行关联，达到了亚微米空间分辨率和高的成像保真度。这项工作提供了一个可靠、易获取且可重复的高性能SPCM平台，该平台可轻松在大多数实验室中实现，用于二维器件的微米尺度光电子表征。
英文摘要
Scanning photocurrent microscopy (SPCM) is a powerful technique for probing local optoelectronic phenomena in 2D semiconducting devices. However, commercial setups remain costly, complex and often lack flexibility and adaptability. In this work, we present a home-built SPCM platform built around the retrofitting of a conventional metallographic microscope by coupling it with different light sources (single-mode fiber-coupled lasers and multimode fiber-coupled high-power LEDs), a motorized XY stage, a digital camera and an electronic readout module. This system enables simultaneous acquisition of photocurrent and reflection intensity maps, requiring minimal modifications of the microscope. We reached sub-micron spatial resolution and high imaging fidelity by correlating photocurrent maps with reflection maps, optical micrographs and AFM topography data on different devices fabricated with different materials (InSe, MoS2, WSe2, Gr), on different substrates (Si/SiO2, compact disk). This work provides a reliable, accessible and reproducible high-performance SPCM platform that can be easily implemented in most laboratories for microscale optoelectronic characterization of 2D devices.
