AI 中文总结
本文提出结合金刚石NV色心宽场成像与数字锁相放大技术，实现快速高灵敏微波场成像，灵敏度达126 nT/√Hz，像素驻留时间低于1毫秒，空间分辨率1.6 μm，可用于集成电路准实时无损诊断。
AI 中文摘要
高分辨率、高灵敏度的微波（MW）磁场成像对于集成电路（IC）无损检测、射频器件表征和自旋电子学研究不可或缺。然而，这些技术的实际应用受到一个普遍挑战的严重制约，即如何从强烈的光学和电子噪声中分离出微弱的磁信号，这从根本上限制了采集速度和检测灵敏度。在此，我们通过引入一种基于金刚石氮-空位（NV）色心系综的宽场成像方案，并与数字锁相放大（DLA）协同结合，克服了这一障碍。通过利用数字解调，DLA能够从背景噪声（如激光强度波动）中精确提取特定调制频率下的微波场响应，显著提高了信噪比（SNR）。因此，我们的系统达到了126 nT/√Hz的磁场灵敏度。至关重要的是，前所未有的信噪比使得像素驻留时间低于一毫秒，从而能够在数秒内获取全场图像——比最先进的基于NV的宽场技术快一个数量级以上。这种速度、灵敏度与微米级空间分辨率（1.6 μm）的结合，为动态微波器件和集成电路的准实时、非侵入式诊断铺平了道路。
英文摘要
High-resolution, high-sensitivity microwave (MW) magnetic field imaging is indispensable for non-destructive integrated circuit (IC) testing, radio-frequency device characterization, and spintronic research. Yet, the practical utility of these techniques is severely constrained by the pervasive challenge of isolating weak magnetic signatures from intense optical and electronic noise, which fundamentally limits both acquisition speed and detection sensitivity. Here, we overcome this barrier by introducing a wide-field imaging scheme based on an ensemble of diamond nitrogen-vacancy (NV) centers, synergistically combined with digital lock-in amplification (DLA). By exploiting digital demodulation, the DLA precisely extracts the MW-field response at a specific modulation frequency from background noise (e.g., laser intensity fluctuations), dramatically improving the signal-to-noise ratio (SNR). Consequently, our system attains a magnetic field sensitivity of 126 nT/$\sqrt(Hz)$. Critically, the unprecedented SNR permits a pixel dwell time of under one millisecond, allowing full-field images to be acquired within seconds-more than an order of magnitude faster than state-of-the-art NV-based wide-field techniques. This combination of speed, sensitivity, and micron-scale spatial resolution (1.6 $μ$m) paves the way for quasi-real-time, non-invasive diagnostics of dynamic MW devices and integrated circuits.
Comments17pages, 11figures
