发表机构
Politecnico of Bari; University of Messina; Universitat Jaume I; Northwestern University（巴里理工大学; 墨西拿大学; 海梅一世大学; 西北大学）
机构由 AI 辅助整理，请以论文原文为准。AI 中文总结
本文提出一种基于磁性隧道结整流的MEMS式两自由度陀螺仪，通过实验校准和模型设计实现线性角速率输出，为CMOS兼容读出开辟新路径。
AI 中文摘要
陀螺仪在导航、消费电子、机器人技术和航空航天应用中至关重要。大多数微机电系统（MEMS）的实现依赖于电容传感机制，这限制了尺寸缩小到微米尺度。在这项工作中，我们引入了一种类似MEMS的两自由度（2-DOF）陀螺仪，利用磁性隧道结（MTJs）的整流功能作为其读出机制和机械动力学的换能器。实验表征的MTJs已被用于校准并进行实验知情的磁机械模型设计，该模型结合了微磁理论与2-DOF机械方程。我们证明了输出与角速率呈线性关系，并且所提出的设备能够利用零差解调方法在动态情况下提取角速率。这些结果为紧凑、互补金属氧化物半导体（CMOS）兼容的读出路径开辟了道路，该路径减少了对紧密电容间隙的依赖，并促进了设备的多物理场设计。
英文摘要
Gyroscopes are essential elements in navigation, consumer electronics, robotics, and aerospace applications. Most micro electro-mechanical systems (MEMS) implementations rely on capacitive sensing mechanisms, which limit the dimensional scaling to the micrometer scale. In this work, we introduce a MEMS-like two-degree-of-freedom (2-DOF) gyroscope that exploits the rectification functionality of magnetic tunnel junctions (MTJs) as its readout mechanism and as the transducer of the mechanical dynamics. Experimentally characterized MTJs have been used to calibrate and perform an experiment-informed design of the magneto-mechanical model combining micromagnetic theory with 2-DOF mechanical equations. We demonstrated that the output is linear with angular rate, and that the proposed device is able to extract the angular rate in dynamic cases exploiting a homodyne demodulation approach. The results open a path towards a compact, complementary metal-oxide semiconductor (CMOS)-compatible readout pathway that relaxes reliance on tight capacitive gaps and motivates multi-physics designs of the device.
