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用于工程化纳米线量子点器件的确定性纳米制造

Deterministic nanofabrication for engineering nanowire quantum dot devices

Tarun Patel, Matteo Pennacchietti, Greg Holloway, Stephen R. Harrigan, Sayan Gangopadhyay, Anthony Drouin, Megha Jain, Dan Dalacu, Philip J. Poole, Sasan Vosoogh-Grayli, Michael E. Reimer

arXiv 2609.03076首次发表:更新:

发表机构

University of Waterloo; Institute for Quantum Computing, University of Waterloo; Quantum-Nano Fabrication and Characterization Facility, University of Waterloo; National Research Council Canada; Queen’s University(滑铁卢大学; 滑铁卢大学量子计算研究所; 滑铁卢大学量子纳米加工与表征设施; 加拿大国家研究委员会; 女王大学)

机构由 AI 辅助整理,请以论文原文为准。

AI 中文总结

本研究开发确定性拾取-放置技术实现纳米线量子点垂直转移,制成光子提取效率75%、波长可调且发射质量高的器件,为规模化量子光子源奠定基础。

AI 中文摘要

半导体量子点(QDs)是实现光子量子技术用明亮、波长可调谐的单光子及纠缠光子对源的领先平台。位点选择纳米线量子点(NWQDs)是可规模化制造此类光子器件的有前景平台,但在保持光子纳米线垂直生长几何结构的同时,在其周围集成额外结构仍是一项挑战。本研究开发了一种确定性拾取-放置技术,用于将NWQDs从生长衬底垂直转移至任意模板;利用该转移技术,通过集成底部金反射镜,将光子提取效率提升至75%,并通过在QD周围集成静电栅极,将发射波长调谐3.6 GHz。重要的是,在转移后测得QD发射的低多光子概率(g^(2)(0)=0.002)和高不可区分性(±100 ps范围内>80%),从而获得了高质量器件。这些结果证明了所开发转移技术的可重复性和通用性,是实现可规模化单光子及纠缠光子源的关键一步。

英文摘要

Semiconductor quantum dots (QDs) are a leading platform for realising bright, wavelength-tunable sources of single and entangled photon pairs for photonic quantum technologies. Site-selected nanowire quantum dots (NWQDs) are a promising platform for fabricating such photonic devices in a scalable manner. However, implementing additional structures around the photonic nanowire while maintaining its vertical growth geometry has remained a challenge. In this work, we develop a deterministic pick-and-place technique to conduct a vertical-to-vertical transfer of NWQDs from the growth substrate to arbitrary templates. Using this transfer technique, we enhance the photon extraction efficiency to 75% by implementing a bottom gold mirror and tune the emission wavelength by 3.6 GHz via implementing electrostatic gates around the QD. Importantly, we measure low-multiphoton probability (g^(2)(0) = 0.002) and high indistinguishability (>80% for +/-100 ps) of the QD emission after the transfer process, yielding high-quality devices. These results demonstrate the repeatability and versatility of the developed transfer technique, which is an enabling step towards scalable single and entangled photon sources.

CommentsMain: 26 pages, 5 figures SI: 16 pages, 13 figures

论文原文

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