AI 中文总结
该研究探讨AAA有理逼近在纳米光栅散射测量响应函数中的适用性，对比其与三次样条插值的收敛性，证实有理逼近在相关场景的应用潜力。
AI 中文摘要
我们研究AAA有理逼近在纳米光栅散射测量相关响应函数中的适用性，考虑存在材料色散的硅线光栅，对比频率采样点数增加时AAA有理逼近与三次样条插值的收敛性，结果表明有理逼近具有潜力，与该光栅共振效应产生的响应函数极点结构一致。
英文摘要
We investigate the applicability of AAA rational approximation to scatterometry-related response functions of nanoscale gratings. A silicon line grating with material dispersion is considered. We compare the convergence of AAA rational approximation with that of cubic spline interpolation as the number of frequency samples is increased. The results demonstrate the potential of rational approximation, consistent with the pole structure of the considered response function arising from resonance effects of the grating.
