AI 中文总结
该研究构建集成电子光学架构，将ESEM工作窗口扩展至20000 Pa压力、1400摄氏度高温环境，实现含水生物标本观察与SEM-QMS同步原位表征，为相关研究提供通用框架。
AI 中文摘要
在同时处于高温、近环境压力（NAP）和反应性气体环境下的扫描电子显微镜（SEM），需要对真空隔离、电子束传输、信号产生和热管理进行协同控制，这些约束长期限制了环境扫描电子显微镜（ESEM）的工作窗口。本文构建了一种集成电子光学架构，将多级差压通路、前级压力过渡、探测器优化、热管理以及气体聚焦采样架构整合为统一的ESEM平台。通过计算流体动力学（CFD）、蒙特卡洛电子-气体散射分析和直接束流测量，对压力分布和电子束传输进行了定量验证；探测器优化和热电子抑制确保了在升高的压力和温度下的稳定成像。该系统可在高达20000 Pa的压力和1400摄氏度的高温下实现稳定的SEM成像，可连续观察含水生物标本，并可通过局部气体采样实现SEM-QMS同步原位表征。这些进展为扩展ESEM至真实原位环境建立了通用电子光学框架，可同时研究高温、反应性气体、结构演化和气相化学。
英文摘要
Scanning electron microscopy (SEM) under simultaneously high-temperature, near-ambient-pressure (NAP), and reactive-gas environments requires coordinated control of vacuum isolation, electron-beam transmission, signal generation, and thermal management, constraints that have long limited the operating window of environmental scanning electron microscopy (ESEM). Here we establish an integrated electron-optical architecture that combines a multistage differential-pressure pathway, front-stage pressure transition, detector optimization, thermal management, and a gas-focusing sampling architecture into a unified ESEM platform. Pressure distribution and electron-beam transmission are quantitatively validated through computational fluid dynamics (CFD), Monte Carlo electron-gas scattering analysis, and direct beam-current measurements, while detector optimization and thermionic-electron suppression preserve stable imaging under elevated pressure and temperature. The resulting system enables stable SEM imaging at pressures up to 20,000 Pa and high-temperature imaging up to 1,400 degrees C, continuous observation of hydrated biological specimens, and synchronized SEM-QMS operando characterization using local gas sampling. These developments establish a general electron-optical framework for extending ESEM toward realistic operando environments where elevated temperature, reactive gases, structural evolution, and gas-phase chemistry can be investigated simultaneously.
Comments31 pages, 8 figures
