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arXiv 2608.27097physics.atom-ph

高电荷态钆的极紫外(EUV)外光谱

Beyond-EUV spectrum of highly-charged gadolinium

发表机构先进纳米光刻研究中心 · 阿姆斯特丹自由大学 · 珀西超级计算研究中心
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  • Advanced Research Center for Nanolithography (ARCNL)(先进纳米光刻研究中心)
  • Vrije Universiteit Amsterdam(阿姆斯特丹自由大学)
  • Pawsey Supercomputing Research Centre(珀西超级计算研究中心)
  • University of New South Wales(新南威尔士大学)

机构由 AI 辅助整理,请以论文原文为准。

M. L. Reitsma, J. Sheil, O. O. Versolato, E. V. Kahl, J. C. Berengut

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中文总结 AI 辅助

该研究针对与极紫外外光源相关的高电荷态钆离子Gd$^{18+}$和Gd$^{26+}$,采用CI+MBPT方法开展从头算相对论计算,明确了多激发态对其光谱的影响,为相关光源研发提供了关键数据支撑。

中文摘要 AI 辅助

我们对与基于激光产生钆等离子体的极紫外(EUV)外光源相关的复杂高电荷态离子Gd$^{18+}$和Gd$^{26+}$进行了从头算相对论计算。采用粒子-空穴组态相互作用结合多体微扰理论(CI+MBPT)方法,系统地饱和了$n=4$组态空间,并确定了多激发态对发射率光谱的影响。对于Gd$^{26+}$,我们发现其行为与等电子体Sn$^{12+}$类似,在某些有效温度下,多激发态有强贡献,甚至出现显著的四重激发态。相比之下,与工业相关的类钯Gd$^{18+}$的6.7nm发射主要由单激发态$4d^{10}$ $^{1}S_{0}$ - $4d^{9}4f$ $^{1}P_{1}$跃迁主导,而多激发态主要贡献于带外发射。

英文摘要

We report ab initio relativistic calculations on the complex Gd$^{18+}$ and Gd$^{26+}$ highly-charged ions, which are relevant to beyond-extreme-ultraviolet (BEUV) light sources based on laser-produced gadolinium plasmas. Using the particle-hole configuration-interaction with many-body perturbation theory (CI+MBPT) method, we systematically saturate the $n=4$ configuration space and determine the influence of multiply excited states on the emissivity spectrum. For Gd$^{26+}$ we find behavior analogous to that of its isoelectronic counterpart Sn$^{12+}$, with strong contributions from multiply excited states, where even the quadruply excited states become significant at certain effective temperatures. In contrast, the industry-relevant 6.7 nm emission of Pd-like Gd$^{18+}$ is dominated by the singly excited $4d^{10} {\ }^{1}S_{0}$ -- $4d^{9}4f {\ }^{1}P_{1}$ transition, while multiply excited states primarily contribute to out-of-band emission. The calculated spectra show good agreement with experiment and demonstrate that the importance of multiply excited states depends strongly on both charge state and plasma conditions.

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