集成在硅介质波导上的室温石墨烯亚太赫兹探测器
Room-temperature graphene sub-terahertz detector integrated on a silicon dielectric waveguide
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中文总结 AI 辅助
本研究展示了单片集成在高电阻率硅介质波导上的室温石墨烯亚太赫兹探测器，实现了D波段探测，其电压响应度达11.5 V/W，为全集成室温太赫兹光子回路提供了可行方案。
中文摘要 AI 辅助
太赫兹（THz）光子学为下一代6G无线通信、片上光谱仪及非侵入式生物医学传感器提供了极具前景的平台。在近红外和中红外波段，单片集成光电探测器是光子集成回路（PICs）的核心组件；然而在THz波段，在低损耗介质波导上实现此类集成仍是一个未解决的挑战：迄今为止，室温下的波导上探测仅能通过分立元件的混合倒装芯片组装实现，这会导致模式耦合差、占用面积大且机械稳定性降低。本研究通过展示一种单片集成在高电阻率硅介质波导上、用于D波段（110-170 GHz）工作的室温石墨烯亚THz探测器，解决了这一缺口。研究人员采用直接图案化在硅表面的锥形缝隙线天线，将六方氮化硼（hBN）封装的石墨烯沟道与导模耦合。该探测器实现了11.5 V/W的电压响应度和1.94 GHz的3 dB带宽，其中带宽目前受读出互连的寄生电感限制，而非本征石墨烯响应。该平台为全集成室温THz光子回路提供了可行路径，其中静电门控和阻抗匹配可将响应度和带宽提升约一个数量级。
英文摘要
Terahertz (THz) photonics offers a promising platform for next-generation 6G wireless communications, on-chip spectrometers, and non-invasive biomedical sensors. In the near- and mid-infrared, monolithically integrated photodetectors are a cornerstone of photonic integrated circuits (PICs). In the THz range, however, such integration on low-loss dielectric waveguides remains an open challenge: to date, room-temperature on-waveguide detection has been realized only through hybrid flip-chip assembly of discrete elements, which leads to poor mode coupling, larger footprint, and reduced mechanical stability. Here we address this gap by demonstrating a room-temperature graphene sub-THz detector monolithically integrated on a high-resistivity silicon dielectric waveguide for D-band (110-170 GHz) operation. We couple an hBN-encapsulated graphene channel to the guided mode using a tapered slot-line antenna patterned directly onto the silicon surface. The detector achieves a voltage responsivity of 11.5 V/W and a 3 dB bandwidth of 1.94 GHz, with the latter currently limited by parasitic inductance of the readout interconnects rather than by the intrinsic graphene response. This platform provides a practical pathway to fully integrated room-temperature THz photonic circuits, where electrostatic gating and impedance matching can improve both responsivity and bandwidth by roughly an order of magnitude.
