MEMS电子单色器的制备与验证
Fabrication and validation of a MEMS Electron Monochromator
AI总结：
该研究采用MEMS技术制备出仅需7个电源调谐的微型电子单色器，通过实验验证其能量过滤能力，为开发紧凑型高性能电子束仪器奠定重要基础。
AI中文摘要：
电子单色器是电子显微镜诸多应用中的关键部件，但常存在体积大、操作复杂的问题。此前研究中，我们提出了一种利用微型静电元件边缘场实现单色化的概念，该概念可通过仅需7个电源调谐的紧凑型单色器设计实现。本文中，我们展示了采用MEMS技术制备此类微型单色器的过程及实验测试结果。制备方案包括采用Bosch深反应离子刻蚀工艺成形透镜和偏转器电极，采用聚焦离子束刻蚀在氮化硅膜上制备纳米级孔径。所有元件随后被镀膜、精确对准，堆叠后通过引线键合连接至外部电源。我们利用组装的原型在扫描电子显微镜中测量电子束能量展宽，验证了该器件的能量过滤能力。这些结果凸显了通过对准和堆叠不同MEMS制备元件制造微型电子光学仪器的可能性，是开发紧凑型、轻量化、高性能电子束仪器的重要一步。
英文摘要：
Electron monochromators are essential components for many applications in electron microscopy but are often large and complex to operate instruments. In prior work, we presented a concept for monochromation using the fringe fields around miniature electrostatic elements. This concept could be realized with a compact monochromator design that requires tuning of only 7 power supplies. In this manuscript, we present the fabrication using MEMS technology and experimental testing of such a miniaturized monochromator. The fabrication scheme involves Bosch deep reactive ion etching to shape lens and deflector electrodes and focused ion beam milling to create nanoscale apertures in a silicon nitride membrane. All elements are then coated, precisely aligned and, after stacking, wire bonded to connect to external power supplies. We use the assembled prototype to measure the electron-beam energy spread in a scanning electron microscope demonstrating the energy filtering capability of the device. These results highlight the possibilities for making miniaturized electron optics instruments using alignment and stacking of different MEMS fabricated elements, representing an important step towards the development of compact, lightweight, high performance electron-beam instrumentation.
