AI 中文总结
本研究提出以可动栅MOSFET为读出器件，解决传统悬臂梁质量传感器电路复杂、集成受限的问题，通过短沟道效应实现高灵敏度质量传感，兼具稳定振荡与全电路集成潜力。
AI 中文摘要
本研究提出了一种用于高灵敏度悬臂梁式质量传感器的新型读出机制，采用可动栅（MG）MOSFET。传统动态模式悬臂梁传感器通过共振频率偏移测量质量，精度高，但需要复杂的模拟电路和较大的器件面积，限制了集成度和小型化。相比之下，所提方法利用MG MOSFET中的强短沟道效应，其中漏极电流随悬臂梁位置呈指数变化，无需模数转换即可实现数量级的变化。数值模拟和初步实验证明了该方法的可行性，还通过栅-沟道系统的静电行为稳定甚至激发振荡，避免了吸合不稳定性。该概念为可扩展、低复杂度、高分辨率质量传感铺平了道路，具备全电路集成潜力。
英文摘要
This work proposes a novel readout mechanism for highly sensitive cantilever-based mass sensors using movable-gate (MG) MOSFETs. Traditional dynamic-mode cantilever sensors measure mass through shifts in resonance frequency, which offer high precision but require complex analog circuitry and large device areas, limiting integration and miniaturization. In contrast, the proposed approach exploits strong short-channel effects in MG MOSFETs, where the drain current depends exponentially on cantilever position, allowing for orders-of-magnitude changes without analog-to-digital conversion. Numerical simulations and initial experiments demonstrate the feasibility of this approach, which also avoids pull-in instability by using the electrostatic behavior of the gate-channel system to stabilize and even excite oscillations. The concept paves the way for scalable, low-complexity, high-resolution mass sensing with full circuit integration potential.
Comments19 pages, 11figures
