集成式微温度计：用于在CMOS 200毫米中试线上构建的致密材料中红外光热光谱
An integrated micro-thermometer for mid-infrared photothermal spectroscopy of dense materials built in a CMOS 200 mm pilot line
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中文总结 AI 辅助
本文提出一种基于铂微传感器的直接光热温度测量方法，构建了集成式微温度计，信噪比近1000，适配小型化嵌入式红外光谱应用，解决了传统间接光热红外光谱检测的界面密封与气体敏感难题。
中文摘要 AI 辅助
致密材料的间接光热红外光谱通常依赖光声池来检测光诱导加热产生的声波，但该检测方法实施难度大，因为它对腔室与样品之间界面的密封质量以及腔室内气体的性质高度敏感。本文提出一种更简化、更稳健的方法，该方法基于直接光热温度测量，采用在薄硅衬底上制备的优化铂微传感器，该衬底作为与样品热透明的界面。本文报道了该传感器的设计、在200毫米CMOS中试线上的制备、在读出印刷电路板（PCB）上的组装以及实验表征。该组件的信噪比接近1000，非常适合小型化和嵌入式红外光谱应用。
英文摘要
Indirect photothermal infrared spectroscopy of dense materials typically relies on photoacoustic cells for detecting acoustic waves generated by light-induced heating. This detection approach can be challenging to implement as it is highly sensitive to the sealing quality of the interface between the cavity and the sample, as well as to the properties of the gas within the cavity. Here, we present a simplified and more robust method. This approach relies on direct photothermal temperature measurement using an optimized platinum microsensor fabricated on a thin silicon substrate that acts as a thermally transparent interface with the sample. The sensor design, fabrication in a 200 mm CMOS pilot line, assembly on a readout PCB, and experimental characterization are reported. The component achieves a signal-to-noise ratio close to 1000 making it well-suited for miniaturized and embedded infrared spectroscopic applications.
