AI 中文总结
该研究提出结合参数优化与种子拓扑优化的端到端设计方法，在遵守代工厂设计规则下优化多模干涉仪性能，经实验验证可提升分束器、模式复用器性能，为将拓扑优化组件集成至商用工艺设计套件提供可行方案。
AI 中文摘要
我们提出了一种基于多模干涉仪（MMI）的光子器件端到端设计方法，该方法将解析模型上的参数优化（PO）与种子拓扑优化（TO）相结合，以在遵守代工厂设计规则的前提下最大化性能。通过种子拓扑优化对参数优化得到的种子器件进行进一步优化，相比单独的解析或参数化方法，该方法可访问更大的设计空间。我们在1×2分束器、TE模式复用器和偏振分束器上验证了该设计流程，并对前两种器件在商用代工厂工艺中进行了制备与测试。种子拓扑优化将1×2分束器的实测插入损耗从0.20 dB降至0.14 dB，将模式复用器的TE00在O波段的传输从-2.79 dB提升至-1.01 dB。将该流程应用于商用代工厂工艺设计套件（PDK）提供的1×2和2×2分束器，可提升模拟传输性能，将2×2分束比从0.524收紧至0.506，同时提升制备鲁棒性，为将拓扑优化设计的组件集成到商用工艺设计套件中提供了经代工厂验证的可行路径。
英文摘要
We present an end-to-end design methodology for multimode interferometer (MMI)-based photonic devices that combines parameter optimization (PO) on analytical models with seeded topology optimization (TO) to maximize performance while preserving foundry design-rule compliance. A PO seed device is further refined via seeded TO, accessing a larger design space than analytical or parameterized methods alone can reach. We validate this pipeline on a 1x2 splitter, a TE modal multiplexer, and a polarization splitter, fabricating and measuring the first two on a commercial foundry process. Seeded TO reduces the measured insertion loss of the 1x2 splitter from 0.20 to 0.14 dB and improves TE00 transmission of the modal multiplexer from -2.79 to -1.01 dB over O-band. Applying this pipeline to a commercial foundry process design kit (PDK)-provided 1x2 and 2x2 splitter improves simulated transmission and tightens the 2x2 splitting ratio from 0.524 to 0.506, along with improved fabrication robustness, offering a practical, foundry-validated route toward incorporating TO-designed components into commercial PDKs.
Comments16 pages, 5 figures
