AI 中文总结
该研究提出一种升华转印策略，利用萘作为临时印章，实现三维纳米结构集合体在多种衬底上的无损伤集成，可制备多种无机光子器件与结构。
AI 中文摘要
用于可见光光子操控的高分辨率三维（3D）纳米结构在光学和光子学领域具备独特且定制化的能力，但亚波长纳米制造以及将三维打印结构可靠地集合转印至任意衬底上仍存在挑战。在此，我们引入一种专为精细三维打印纳米结构集合体转印设计的升华转印策略，该策略可实现三维结构阵列在多种衬底上的保形、无损伤集成。萘作为临时印章，在转印和放置过程中封装结构，我们利用萘的低升华温度以近零应力可靠释放结构，防止机械损伤和位置错位。该方法可广泛应用于将多种纳米结构和光子器件集成到各类衬底上，并通过集合均匀后处理实现无机架构，包括柔性PDMS上的2.5D光子晶体、曲面透镜上的衍射光学元件、CMOS芯片上的螺旋相位板、光纤端面上的多层消色差超构透镜，以及抗粘石英上的三维玻璃光子晶体和光学拓扑谐振器。
英文摘要
High-resolution three-dimensional (3D) nanostructures for visible-light photon manipulation provide unique and bespoke capabilities in optics and photonics. However subwavelength nanofabrication and reliable ensemble manipulation of the 3D prints onto arbitrary substrates remain challenging. Here, we introduce sublime transfer strategy tailored for transfer printing ensembles of delicate 3D printed nanostructures. This strategy enables conformal, damage-free integration of arrays of 3D structures on diverse substrates. Naphthalene acts as a transient stamp to encapsulate the structures during transfer and placement. We rely on the low sublimation temperature of naphthalene to release the structures reliably with nearly zero stress, preventing mechanical damage and positional misalignment. This approach is broadly applicable to integrate diverse nanostructures and photonic devices onto various substrates, and enabling inorganic architectures through ensemble uniform post-processing, including 2.5D photonic crystals on flexible PDMS, diffractive optical elements on curved lenses, spiral phase plates on CMOS chips, multilayer achromatic metalens on optical fiber facet, as well as 3D glass photonic crystals and optical topological resonators on anti-stiction quartz.
