AI 中文总结
该研究利用导模共振（GMR）结构实现了相干增强的角位移读取，在纳瓦级光功率下分辨出Q≈10⁶扭转模的热运动，确立了量子光力传感器角位移读取的片上方法。
AI 中文摘要
测量机械振荡器的角位移是一项普遍任务，但角光力耦合的多模特性使相干信号增强颇具挑战。本文展示了利用集成导模共振（GMR）结构实现相干增强的角位移读取，并将其应用于纳米机械振荡器的精密读取。具体而言，我们在100纳米厚的Si₃N₄膜上制备亚波长光栅，通过直接透射测量记录其振动。GMR的窄线宽约为2.5 mrad，可在纳瓦级光功率下实现散粒噪声受限的位移不确定度10⁻⁹ rad/√Hz，足以分辨Q≈10⁶扭转模的热运动，信噪比达47 dB。基于偏振和波长失谐的对照实验证实，所测信号源于GMR介导的转换。这些结果确立了导模共振作为量子光力传感器中角位移读取的片上方法。
英文摘要
Measuring the angular displacement of a mechanical oscillator is a ubiquitous task; however, the multimode nature of angular optomechanical coupling makes coherent signal enhancement challenging. Here we demonstrate coherently enhanced angular displacement readout with an integrated guided mode resonance (GMR) structure, applying it to precision readout of a nanomechanical oscillator. Specifically, we fabricate subwavelength gratings into 100-nm-thick Si$_3$N$_4$ membranes and record their vibration by direct transmission measurements. The narrow linewidth $\approx 2.5\;\text{mrad}$ of the GMR enables a shot-noise-limited displacement imprecision of $ 10^{-9}\;\text{rad}/\sqrt{\text{Hz}}$ with nanowatts of optical power, sufficient to resolve the thermal motion of a $Q\approx 10^6$ torsion mode with a signal-to-noise ratio of 47 dB. Control experiments based on polarization and wavelength detuning confirm that the measured signal arises from GMR-mediated transduction. These results establish guided-mode resonance as an on-chip approach to angular displacement readout in quantum optomechanical sensors.
Comments7 pages, 7 figures
