二维材料自动化机器人制备及二维异质结构制备的进展与机遇
Advances and opportunities for automated robotic preparation of 2D materials and fabrication of 2D heterostructures
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中文总结 AI 辅助
本文综述了二维材料及异质结构自动化机器人制备的进展，指出人工制备已达极限，需AI驱动的自动化工具推动该领域向新前沿发展。
中文摘要 AI 辅助
从范德华晶体中进行二维原子片的机械剥离、转移和堆叠可协同实现二维异质结构的原子级逐层工程，定制化的异质结构可产生新的奇异现象和物质状态。现有范德华材料种类繁多，二维半导体、绝缘体、磁体、金属、拓扑材料等各类体系间的耦合方式几乎无限。对这一广阔空间的实验探索始于高质量二维异质结构的制备，目前通常依赖人工执行精细操作。尽管人工制备已取得诸多科学进展，且展现出进一步开发更复杂二维异质结构的巨大潜力，但当前科学前沿定义的二维异质结构复杂度很快将超出人工制备的能力。因此，对能以更高质量、更快速率、更好可重复性制备二维材料及复杂二维异质结构的机器人设备的需求正在增长。本综述涵盖了应对这一挑战的最新科学、仪器及加工进展，包括用于机械剥离、二维微晶光学计量、堆叠的机器人设备，以及无有机印章、真空兼容加工工具、人工智能（AI）等支撑技术的进展。展望未来，预计这些现有进展将催生出新一代AI驱动的自动化先进制造工具，这类工具将把当前二维异质结构科学的前沿与由高质量复杂多层二维异质结构系统精密制备所定义的新科学前沿连接起来。
英文摘要
The mechanical exfoliation, transfer, and stacking of 2D atomic sheets from van der Waals crystals synergize to enable atomic layer-by-atomic layer engineering of 2D heterostructures with tailored properties that yield new exotic phenomena and states of matter. With the huge variety of van der Waals materials available, there is a limitless number of ways to couple 2D semiconducting, insulating, magnetic, metallic, topological, etc. systems with one another. Experimental exploration of this vast space starts with the fabrication of high-quality 2D heterostructures, which is commonly performed manually, relying on humans to execute delicate operations. Many scientific advancements have been achieved in this manner, revealing immense potential for further discovery and innovation of increasingly sophisticated 2D heterostructures. However, soon, the complexity of the 2D heterostructures that define the scientific state-of-the-art will exceed the capabilities of manual fabrication. Therefore, the demand for robotic instruments for preparing 2D materials and fabricating complex 2D heterostructures with greater quality, at higher rates, and with better reproducibility is increasing. This review covers recent scientific, instrumentation, and processing advances rising to this challenge. Robotic instruments for mechanical exfoliation, optical metrology of 2D crystallites, stacking, as well as advancements in supporting technologies such as organic-free stamps, vacuum-compatible processing tools, and artificial intelligence (AI) are covered. Looking forward, a new generation of AI-driven, automated advanced manufacturing tools is anticipated to emerge from these current advancements. These new tools will bridge the current state-of-the-art of 2D heterostructure science to new scientific frontiers defined by precision fabrication of high-quality, complex, many-layer 2D heterostructure systems.
