AI 中文总结
该研究研发了工作于毫米波和亚毫米波的SWISS波导光谱仪，采用矩形波导架构，通过非接触超材料过渡等设计提升性能，相关原型研发取得进展。
AI 中文摘要
我们介绍一种新型紧凑型片上集成光谱仪的设计与研发，其工作在毫米波（mm）和亚毫米波（sub-mm）波长范围。超导波导集成亚毫米波光谱仪（SWISS）采用自由空间矩形波导架构，相较于当前毫米波光谱仪，有望在光谱分辨率、光学效率和频率覆盖范围方面实现显著提升。光通过天线前端耦合输入，该前端可分离两种偏振态，并通过非接触超材料过渡结构将其传输至波导光谱仪。每个波导光谱仪由一条馈线与一系列基于单极点腔谐振器的滤波器耦合而成，这些谐振器具有不同的谐振频率。为最大化封装密度，滤波器组被定向在焦平面之外，腔滤波器输出端的E面弯曲结构可实现平面化且可扩展的构造。每个滤波器的输出耦合至动能电感探测器（KID），以实现高复用因子。该光谱仪采用深反应离子刻蚀（DRIE）工艺刻蚀的硅晶圆堆叠并金属化制备而成。在本论文中，我们讨论SWISS原型的当前研发进展，包括原型天线前端非接触过渡结构的测量结果以及原型波导光谱仪的制备情况。
英文摘要
We present the design and development of a novel, compact integrated on-chip spectrometer operating at millimeter (mm) and submillimeter (sub-mm) wavelengths. The Superconducting Waveguide Integrated Submillimeter Spectrometer (SWISS) promises significant improvements in spectral resolution, optical efficiency, and frequency coverage over current mm-wave spectrometers by using a free-space rectangular waveguide architecture. Light is coupled in through the antenna front end, which separates the two polarizations and passes them to the waveguide spectrometer through a contactless metamaterial transition. Each waveguide spectrometer consists of a feedline coupled to a series of filters based on single-pole cavity resonators with varying resonant frequencies. To maximize packing density, the filter banks are oriented out of the focal plane, and an E-plane bend in the output from the cavity filters enables a planar and scalable construction. The output of each filter is coupled to a kinetic inductance detector (KID) to enable high multiplexing factors. The spectrometer is fabricated using stacks of silicon wafers etched with a deep reactive-ion etch (DRIE) and metallized. In these proceedings, we discuss current development on a SWISS prototype including measurements on a prototype antenna front end contactless transition and fabrication a prototype waveguide spectrometer.
Comments10 pages, 8 figures, to be published to Proceedings of SPIE Astronomical Telescopes and Instrumentation 2026, "Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XIII". Paper number 14156-96
