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用于CMOS集成太赫兹超分辨率成像的自由形式超振荡光学器件

Freeform super-oscillatory optics for CMOS-integrated THz super-resolution imaging

Jin Chen, Liang Gao, Hao Guo, Zhi Chao Chen, Kang Jie Lin, Kam Man Shum, Ka Fai Chan, Chi Hou Chan

arXiv 2608.04711首次发表:更新:

AI 中文总结

该研究设计了一种新型自由形式超振荡透镜,实现太赫兹波段超宽带消色差超分辨率聚焦,结合CMOS集成平台可分辨亚毫米特征,为高性能集成光子学发展提供新方案。

AI 中文摘要

衍射极限从根本上限制了远场成像系统的空间分辨率。虽然近场技术可以规避该极限,但其固有的短工作距离(WD)严重限制了实际应用。超振荡透镜(SOL)提供了一种远场替代方案;然而,传统SOL存在离散工作波长、效率低(低于5%)以及数值孔径、色差和景深(DOF)之间难以平衡的问题。在此,我们引入一种非局域非线性曲率机制来设计自由形式SOL,实现了超宽带(0.3至1太赫兹)消色差超分辨率聚焦,效率达到前所未有的44%。在9毫米工作距离下,该透镜保持约0.45倍波长的一致亚衍射半高全宽(FWHM),同时景深扩展至约10倍波长。通过集成紧凑的65纳米CMOS振荡器辐射器阵列,我们构建了先进成像平台,能够分辨复杂的二维和三维亚毫米特征(低至0.15毫米)。该自由形式SOL范式可通过双光子光刻轻松扩展至光学领域,为下一代高性能集成光子学铺平道路。

英文摘要

The diffraction limit fundamentally constrains the spatial resolution of far-field imaging systems. While near-field techniques can circumvent this limit, their inherently short working distances (WD) severely restrict practical applications. Super-oscillatory lenses (SOLs) offer a far-field alternative; however, conventional SOLs are plagued by discrete operating wavelengths, low efficiencies (below 5%), and formidable trade-offs among numerical aperture, chromatic aberration, and depth of focus (DOF). Here, we introduce a nonlocal, nonlinear-curvature mechanism to design a freeform SOL that achieves ultrabroadband (0.3 to 1 THz), achromatic super-resolution focusing with an unprecedented efficiency of 44%. Operating at a 9 mm WD, the lens maintains a consistent sub-diffraction full-width at half-maximum (FWHM) of around 0.45 wavelength alongside an extended DOF of around 10 wavelengths. By integrating a compact 65-nm CMOS oscillator-radiator array, we establish an advanced imaging platform capable of resolving complex 2D and 3D sub-millimeter features (down to 0.15 mm). Readily scalable to the optical regime via two-photon lithography, this freeform SOL paradigm paves the way for next-generation, high-performance integrated photonics.

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