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用于原子分辨率成像的透射电子显微镜(TEM)与扫描透射电子显微镜(STEM)中通过动态控制样品台实现皮米级实时漂移校正

Picometre-scale real-time drift correction in TEM and STEM by dynamic control of the specimen stage for atomic-resolution imaging

Christophe Gatel, Julien Dupuy, Teresa Hungria, Martin J. Hytch

arXiv 2608.03344首次发表:更新:

AI 中文总结

本研究开发无需硬件修改的动态控制软件框架,通过控制样品台实现皮米级实时漂移校正,提升TEM、STEM成像质量,支持原子分辨率成像及各类实验应用。

AI 中文摘要

本研究展示了如何通过控制样品台将漂移主动补偿至皮米级精度,所采用的动态控制是一种通用的实时反馈框架,旨在通过持续监测探测器数据流中的实验变量并在采集过程中补偿其变化,主动稳定电子显微镜实验。该框架适用于多种可控的实验不稳定性,包含自动校准程序,可与图像采集并行运行,且作为软件插件实现,无需对显微镜进行任何硬件修改。针对多款配备传统机械样品台及压电样品台的TEM和STEM仪器,展示了实时漂移校正的结果,涵盖中等分辨率TEM、高分辨率TEM、高角环形暗场扫描透射电子显微镜(HR-STEM)及原位观测实验。采用压电样品台时,实现了皮米级的样品稳定,支持经漂移校正的原子分辨率成像。基于样品台的稳定化通过增加有效曝光时间、保持视场、维持相同光学条件及消除对大型数据集数值配准的需求,显著提升了长曝光成像与原位实验的效果。除本研究的特定应用外,动态控制为电子显微镜实验的实时调控提供了通用框架,并为定量成像、自动化原位研究及多模态采集开辟了新前景。

英文摘要

In this work, we show how the specimen drift can be actively compensated by controlling the stage with precision down to the picometre scale. We do this by dynamic control, a generic real-time feedback framework designed to actively stabilize electron microscopy experiments by continuously monitoring an experimental variable from the detector data stream and compensating its evolution during acquisition. The framework, applicable to a broad range of controllable experimental instabilities, includes automated calibration procedures, operates in parallel with image acquisition and is implemented as a software plugin without requiring any hardware modification of the microscope. Results for live drift correction are shown for a selection of TEM and STEM instruments using conventional mechanical stages as well as piezoelectric stages. Experimental results are presented for medium resolution TEM, high-resolution TEM, HR-STEM and in situ observations. With piezoelectric stages, specimen stabilization down to the picometre scale was achieved allowing drift-corrected atomic-resolution imaging. Specimen stage-based stabilization significantly improves long-exposure imaging and in situ experiments by increasing the effective exposure time, preserving the field of view, maintaining identical optical conditions and eliminating the need for numerical alignment of large datasets. Beyond the specific application presented here, dynamic control provides a versatile framework for real-time regulation of electron microscopy experiments and opens new perspectives for quantitative imaging, automated in situ studies and multimodal acquisitions.

Comments27 pages, 9 figures. Submitted to Ultramicroscopy Christophe Gatel: Writing original draft, Software, Methodology, Investigation, Data treatment, Conceptualization, Resources, Funding acquisition. Julien Dupuis: Software, Conceptualization, Methodology. Teresa Hungria: STEM experiment, Review & editing. Martin Hytch: Review & editing, Data treatment, Resources, Funding acquisition

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