AI 中文总结
该研究将商用电容式MEMS麦克风裸片用作空气耦合超声发射器，研制28裸片参量阵原型，其在特定频率驱动下可产生定向差频超声，相关结果与理论及仿真对比分析，还探讨了多项影响因素。
AI 中文摘要
本文研究商用型电容式MEMS麦克风裸片在非线性吸合与回弹驱动下作为空气耦合超声发射器的性能，并展示了一款紧凑型参量阵原型。单个裸片可产生大尺寸振膜位移，在空气中生成可测量的超声压力；由28个裸片组成的阵列在83kHz和93kHz驱动时，可在10kHz差频处产生定向分量。研究将测量结果与分析辐射理论、有限元建模进行对比，还讨论了孔径、填充因子、器件均匀性及接收器非线性的影响。
英文摘要
This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a compact parametric-array prototype. A single die produces large diaphragm displacement and measurable ultrasonic pressure in air. A 28-die array driven at 83 and 93 kHz generates a directional component at the 10 kHz difference frequency. Measurements are compared with analytical radiation theory and finite-element modeling, and the effects of aperture, fill factor, device uniformity, and receiver nonlinearity are discussed.
Comments14 pages, 9 figures. Expanded article based on work presented at the 183rd Meeting of the Acoustical Society of America. This version adds a 28-die parametric-array prototype, analytical and finite-element modeling, and extended discussion. An earlier meeting abstract covering part of this work appeared in J. Acoust. Soc. Am. 152, A50-A51 (2022), DOI: 10.1121/10.0015506
