AI 中文总结
本研究基于4H-SiC平台研制边带分辨光机械谐振器，采用干涉工程抑制锚定损耗，实现高光学与机械品质因子，首次观测到该平台的光机械诱导透明，确立其作为集成腔光力学平台的潜力。
AI 中文摘要
边带分辨腔光机械谐振器是实现相干光子-声子相互作用的有力平台，可应用于量子态转换、光机械诱导透明、精密传感及微波光子学等领域。然而，在集成微谐振器中实现该工作机制，需同时满足窄光学腔线宽、高频机械模式及低机械损耗的要求。本研究首次报道基于4H碳化硅（4H-SiC）平台的边带分辨光机械谐振器，通过将紧凑微盘几何结构与干涉工程设计的锚定损耗抑制技术相结合，同步实现了超过$1\times10^6$的本征光学品质因子、室温下最高达$1.51\times10^4$的机械品质因子，以及大于7的边带分辨因子。系统的数值与实验研究表明，锚定损耗存在局部极小值，无需过度刻蚀即可实现高机械品质因子，大幅提升了制备良率与器件鲁棒性。研究还首次在集成4H-SiC谐振器中观测到光机械诱导透明现象，证实该材料平台存在相干腔光机械相互作用。上述结果确立了4H-SiC作为集成腔光力学平台的应用潜力，为面向经典与量子光子技术的可扩展光子-声子器件提供了实用路径。
英文摘要
Sideband-resolved cavity optomechanical resonators provide a powerful platform for coherent photon--phonon interactions, enabling applications ranging from quantum state transduction and optomechanically induced transparency to precision sensing and microwave photonics. Achieving this regime in integrated microresonators, however, requires simultaneously realizing a narrow optical cavity linewidth, a high-frequency mechanical mode, and low mechanical dissipation. Here, we report the first sideband-resolved optomechanical resonators based on the 4H silicon carbide (4H-SiC) platform. By combining compact microdisk geometries with interference-engineered anchor-loss suppression, we simultaneously achieve intrinsic optical quality factors exceeding $1\times10^6$, room-temperature mechanical quality factors up to $1.51\times10^4$, and a sideband-resolution factor greater than seven. Systematic numerical and experimental studies reveal that a local minimum in anchor loss enables high mechanical quality factors without requiring aggressive undercutting, substantially improving fabrication yield and device robustness. We further demonstrate the first observation of optomechanically induced transparency in integrated 4H-SiC resonators, confirming coherent cavity optomechanical interactions in this material platform. These results establish 4H-SiC as a promising platform for integrated cavity optomechanics and provide a practical route toward scalable photon--phonon devices for classical and quantum photonic technologies.
