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用于高功率激光系统的单片多焦点金刚石超透镜

Monolithic Multifocal Diamond Metalens for High-Power Laser Systems

Xiaoxuan Li, Xiaoyu Sun, Ce Li, Zhiqiang Xie, Fengjiang Liu, Boqu Chen, Ding Zhao, Kaikai Du, Min Qiu

arXiv 2607.25264首次发表:更新:

AI 中文总结

研究高功率激光系统中多光束处理问题,通过单片多焦点金刚石超透镜实现,该超透镜利用纳米柱产生焦点,具有高热稳定性和功率耐受性,在激光辐照下表现优异,拓宽了透射超光学工作范围。

AI 中文摘要

高功率激光系统越来越依赖多光束处理来提高制造产量。然而,传统多焦点系统受限于庞大架构、严格对准要求以及在强辐照下易受激光诱导退化影响。本文展示了一种孔径为7.2毫米的单片多焦点金刚石超透镜,具有出色的热稳定性和功率耐受性。该器件采用高纵横比截顶圆锥金刚石纳米柱在4毫米焦距处产生两个相距200微米的焦点。在25瓦脉冲激光持续辐照1小时下,焦点偏移仅25.5微米,在碳化硅激光划片时加工深度变化远低于商用物镜与分束衍射光学元件组合。在极端光学负载下,超透镜能承受高达8.25千瓦连续波激光辐照30秒无结构退化,金刚石的激光诱导损伤阈值为2.45 J/(cm²)。这项工作拓宽了透射超光学在极端光学负载下的工作范围,为高功率光子系统带来新机遇。

英文摘要

High-power laser systems increasingly rely on multi-beam processing to enhance manufacturing throughput. However, conventional multifocal systems remain constrained by bulky architectures, stringent alignment requirements, and susceptibility to laser-induced degradation under intense irradiation. Here, we demonstrate a monolithic multifocal diamond metalens with a 7.2 mm aperture that maintains exceptional thermal stability and power tolerance. The device employs high-aspect-ratio truncated-cone diamond nanopillars to generate two focal spots separated by 200 μm at a focal length of 4 mm. Under sustained 25 W pulsed-laser irradiation for 1 h, the diamond metalens exhibits a focal shift of only 25.5 μm, resulting in a maximum processing-depth variation of 33.2 μm during 4H silicon carbide (SiC) laser scribing, far below the 319.1 μm deviation observed for a commercial objective lens combined with a beam-splitting diffractive optical element (DOE). Even under extreme optical loading, the metalens withstands continuous-wave laser irradiation up to 8.25 kW for 30 s without structural degradation, while complementary pulsed testing yields a laser-induced damage threshold (LIDT) of 2.45 J/(cm^2) for diamond. This work broadens the operating envelope of transmissive meta-optics to extreme optical loads, opening new opportunities across high-power photonic systems.

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