AI 中文总结
研究针对芯片级光机械装置受外部振动影响精度受限的问题，引入双毫克质量扭转振荡器，通过反对称扭转模式抑制振动，实现高精度传感，展示了克服振动噪声的技术，对光机械传感意义重大。
AI 中文摘要
芯片级光机械装置推动了惯性传感器的小型化和下一代基础物理实验。然而，由于外部振动，往往无法达到理论极限精度。一种解决方案是对装置进行定制，使其在与感兴趣信号保持耦合的同时，将一个自由度与环境隔离。为此，我们引入了一种双毫克质量扭转振荡器，通过在应变氮化硅纳米带上加载质量形成。反对称扭转模式将振动抑制了一个数量级以上，实现了$10^{-18}$ Nm/$\sqrt{\rm Hz}$的热限扭矩灵敏度，同时保持超低损耗。我们通过在30 Hz带宽内检测$10^{-16}$ Nm的光辐射压力扭矩来展示传感能力。我们还对该装置进行了基于频率的重力测量表征，在振荡幅度仅为$100 \mu$rad的情况下，30秒内实现了$10^{-6}g_0$（$g_0 = 9.8$ $\rm m s^{-2}$）的精度。该装置展示了一种克服振动噪声的技术，对从商业应用到基础物理实验的光机械传感具有广泛意义。
英文摘要
Chip-scale optomechanical devices are driving the miniaturization of inertial sensors and next generation fundamental physics experiments. However, precision at the theoretical limit is often unattainable due to extraneous vibrations. One solution is tailoring the device to isolate a degree of freedom from the environment while maintaining coupling to the signal of interest. To this end, we introduce a dual milligram-mass torsion oscillator, formed by mass loading a strained silicon nitride nanoribbon. The antisymmetric torsion mode suppresses vibrations by over an order of magnitude to achieve a thermally limited torque sensitivity of $10^{-18}$ Nm/$\sqrt{\rm Hz}$ while maintaining ultralow loss. We demonstrate the sensing ability by detecting an optical radiation pressure torque of $10^{-16}$ Nm over a 30 Hz bandwidth. We also characterize the device for frequency-based gravimetry, demonstrating $10^{-6}g_0$ ($g_0=9.8$ $\rm m s^{-2}$) precision in 30 seconds with an oscillation amplitude of only 100 $μ$rad. This device demonstrates a technique for overcoming vibration noise, with broad implications for optomechanical sensing from commercial applications to fundamental physics experiments.
