AI 中文总结
研究非晶态氮化硼到非晶-晶态混合相氮化硼热学和弹性质演变。通过化学气相沉积合成薄膜，利用多种手段研究其结构转变及相关性质变化，发现热导率和杨氏模量随结晶度变化规律，杂质和成分可调节性质以用于多领域。
AI 中文摘要
非晶态氮化硼（aBN）是一种很有前景的电介质和保护涂层，但其纳米级散热和弹性响应仍缺乏量化。本文通过基于硼嗪的化学气相沉积（800-1000℃）合成了多种氮化硼薄膜，研究了从完全非晶网络到含嵌入式六方氮化硼的非晶-晶态混合薄膜的温度驱动结构转变。时域热反射数据显示，aBN的超低、厚度依赖性平面内热导率（10-40nm时kout<0.5W m-1 K-1）随结晶度系统增加，最高可达1.5W m-1 K-1。微布里渊光散射和有限元模拟显示其同时变硬，杨氏模量从7.5±0.7GPa（800℃）升至53±5GPa（1000℃）。格林-库博分子动力学模拟通过键合拓扑和振动输运解释了这些趋势，并强调了氧、氢和碳杂质及成分如何为进一步调节氮化硼薄膜的热学和力学响应提供实用旋钮，以改善纳米电子、互连和涂层应用。
英文摘要
Amorphous boron nitride (aBN) is a promising dielectric and protective coating, yet its nanoscale heat dissipation and elastic response remain poorly quantified. Here we synthesize a variety of BN thin films by borazine-based chemical vapor deposition (800-1000 C) and study the temperature-driven structural transition from fully amorphous networks to mixed amorphous-crystalline films with embedded BN nanocrystallites.Frequency-domain thermoreflectance data show an ultralow, thickness-dependent cross-plane thermal conductivity for aBN (kout < 0.5 W m-1 K-1 for 10-40 nm), which increases systematically with crystalline order up to 1.5 W m-1 K-1. Micro-Brillouin light scattering and finite-element modelling reveal a concomitant stiffening, with Young's modulus rising from 7.5 +/- 0.7 GPa (800 C) to 53 +/- 5 GPa (1000 C). Green-Kubo molecular dynamics simulations rationalize these trends via bonding topology and vibrational transport, and highlight how oxygen, hydrogen and carbon impurities and composition provide practical knobs to further tune the thermal and mechanical responses in BN films for improving nano-electronics, interconnects and coating applications.
