独立BaTiO3薄膜中厚度依赖的裂纹抑制与皱纹形成
Thickness-dependent crack suppression and wrinkle formation in freestanding BaTiO3 membranes
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中文总结 AI 辅助
研究独立BaTiO3薄膜中裂纹与皱纹形成问题，通过联合控制氧化物与聚合物支撑厚度来调节，如改变BaTiO3厚度会出现裂纹与皱纹的权衡，聚合物支撑厚度也影响皱纹，还揭示了相关影响因素，为集成铁电体到未来设备建立加工指南。
中文摘要 AI 辅助
独立铁电氧化物薄膜为硅集成低功耗电子和存储设备提供了一条有前景的途径，但可重复的薄膜质量仍具有挑战性，尤其是在超薄BaTiO3（BTO）中，裂纹和皱纹阻碍了集成。本文表明，通过联合控制氧化物厚度和聚合物支撑厚度，可以调节释放的BaTiO3薄膜中的裂纹和皱纹形成。将BaTiO3厚度从15nm降低到5nm可抑制分析区域内大面积、光学可见的裂纹，但会促进致密的纳米级皱纹，揭示了断裂缓解与形态不稳定性之间的权衡。在10nm BaTiO3薄膜中，聚合物支撑厚度进一步调节皱纹，中间厚度降低皱纹密度。压电力显微镜揭示了释放后写入对比度随时间的演变，表明表观铁电响应受极化切换、释放后形态、界面接触、电荷屏蔽和应变松弛的影响。这些结果为将独立铁电体集成到未来设备中建立了加工指南。
英文摘要
Freestanding ferroelectric oxide membranes offer a promising route toward silicon-integrated low-power electronic and memory devices, but reproducible membrane quality remains challenging, particularly in ultrathin BaTiO3 (BTO), where cracking and wrinkling hinder integration. Here, we show that crack and wrinkle formation in released BaTiO3 membranes can be tuned by jointly controlling oxide thickness and polymer support thickness. Reducing the BaTiO3 thickness from 15 nm to 5 nm suppresses large-area, optically visible cracking across the analysed regions, but promotes dense nanoscale wrinkling, revealing a trade-off between fracture mitigation and morphological instability. In 10 nm BaTiO3 membranes, polymer support thickness further modulates wrinkling, with an intermediate thickness reducing wrinkle density. Piezoresponse force microscopy reveals time-dependent evolution of written contrast after release, indicating that apparent ferroelectric response is influenced by polarization switching, post-release morphology, interfacial contact, charge screening, and strain relaxation. These results establish processing guidelines for integrating freestanding ferroelectrics into future devices.
