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使用块状磷酸钛氧铷的介质加载导波电光调制器

Dielectric-loaded guided-wave electro-optic modulator using bulk rubidium titanyl phosphate

David Trop, Boris Desiatov

arXiv 2607.19015首次发表:更新:

AI 中文总结

针对磷酸钛氧铷在集成或导波调制器应用受限问题,提出介质加载导波调制器,利用未蚀刻块状RTP晶体上的氮化硅条形成近表面光学模式,分析了全矢量光学模式等性能。

AI 中文摘要

磷酸钛氧铷(RTP)因其具有线性电光响应、低介电常数、高电阻率、可忽略的压电振铃和高光学损伤耐受性,被广泛用于块状普克尔盒。但由于缺乏成熟的薄膜RTP平台,其在集成或导波调制器中的应用受到限制。本文提出一种介质加载导波调制器,未蚀刻的块状RTP晶体上的氮化硅条形成与侧电极场重叠的近表面光学模式。分析聚焦于全矢量光学模式、GSG静电和射频响应、张量感知电光耦合以及1064nm的器件级性能。

英文摘要

Rubidium titanyl phosphate (RTP) is widely used in bulk Pockels cells because it combines a useful linear electro-optic response with low dielectric permittivity, high electrical resistivity, negligible piezoelectric ringing, and high optical-damage tolerance. Its use in integrated or guided-wave modulators has been limited by the absence of a mature thin-film RTP platform. Here we propose a dielectric-loaded guided-wave modulator in which a silicon nitride strip on an unetched bulk RTP crystal forms a near-surface optical mode that overlaps with side-electrode fields. The analysis focuses on full-vector optical modes, GSG electrostatic and RF response, tensor-aware electro-optic coupling, and device-level performance at 1064~nm.

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