AI 中文总结
研究以CF₄和Ar混合气体的低压电容射频放电为例，通过光纤相分辨光发射光谱Fiber PROES非侵入式监测等离子体参数变化，发现其与电子功率吸收模式转变相关，可用于等离子体工艺监测和开发。
AI 中文摘要
监测与工艺相关的等离子体参数变化，如电子密度和离子通量，对等离子体工艺的开发和控制至关重要。但侵入性诊断通常无法用于商业反应器。以CF₄和Ar不同混合气体的低压电容射频放电为例，证明可通过光纤相分辨光发射光谱（Fiber PROES）非侵入式监测等离子体参数变化。通过观察选定发射线跟踪高能电子的时空分辨动力学。通过探针和减速场能量分析仪诊断直接测量电子密度和离子通量随驱动电压和压力的变化，发现这些等离子体参数的变化，包括滞后效应，与Fiber PROES揭示的电子功率吸收模式转变相关。这种模式转变导致电子能量分布函数变化，从而影响等离子体参数。基于这些发现，Fiber PROES可作为等离子体工艺监测和基于知识开发的非侵入式诊断方法。
英文摘要
Monitoring changes of process-relevant plasma parameters, such as the electron density and ion flux to the wafer, is essential for the development and control of plasma processes. However, invasive plasma diagnostics, such as probe measurements, typically cannot be applied to commercial reactors. At the example of a low pressure capacitive radio frequency discharge operated in different mixtures of CF$_4$ and Ar, we demonstrate that changes of such plasma parameters can be monitored non-invasively by phase resolved optical emission spectroscopy via optical fibers (Fiber PROES), for which the ports are usually available at industrial plasma sources. In this way, the spatio-temporally resolved dynamics of energetic electrons are tracked by observing a selected emission line. By measuring the electron density and ion flux directly via probe and retarding field energy analyzer diagnostics as a function of driving voltage and pressure, changes of these plasma parameters, including hysteresis effects, are found to be correlated with transitions of the electron power absorption mode revealed by Fiber PROES. Such mode transitions cause the electron energy distribution function (EEDF) to change and, thus, affect such plasma parameters. Based on these findings, Fiber PROES can be used as a non-invasive diagnostic for the monitoring and knowledge-based development of plasma processes.
Comments11 pages, 7 figures
