ATLAS18生产ITk条形传感器的质量控制（QC）总结
Summary of quality control (QC) of ATLAS18 production ITk strip sensors
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中文总结 AI 辅助
为满足HL-LHC运行要求，ATLAS实验用ITk替换内探测器，其含约18000个硅条形传感器。多个国际机构开展多年质量控制计划，涵盖多种测试。通过实施标准化程序等，确保一致评估与数据处理，介绍了生产和QC框架及关键发现，超91%产品通过测试。
中文摘要 AI 辅助
为满足大型强子对撞机（HL-LHC）高亮度升级的苛刻运行要求，ATLAS实验用新的全硅内跟踪器（ITk）替换当前内探测器。ITk有源传感器面积165平方米，约18000个ATLAS18 n+-in-p硅条形传感器分布在外跟踪层。硅传感器有八种几何形状，针对两种桶形和六种端盖模块类型设计，能耐受高达1.6 x 10^15 neq/cm2的注量和66 Mrad的电离剂量。多个国际机构正在开展全面的多年质量控制（QC）计划，评估这些ITk条形传感器的机械和电气一致性。QC过程包括IV/CV表征、全条测试、长期电流稳定性监测、目视检查和计量测试。为管理每月约五百个传感器的高产量，合作团队实施了标准化测试程序、数据监测和完整性检查软件包统一数据格式和自动化分析工具。标准化确保了一致的通过/失败评估和集中数据处理，能够在多年生产期间有效识别所有站点的趋势和异常。本论文概述了ITk条形传感器的生产和QC框架，以及整个生产过程中的关键发现，如传感器充电、漏电流稳定性、不可恢复的IV击穿和晶圆内条间低隔离度。它还提供了有关传感器产量、质量趋势的见解，并审查了特定案例研究，如p-stop掺杂不均匀性。超过91%的总产量，共计超过590批次，按原样进行了测试并被接受。
英文摘要
To address the demanding operational requirements of the High-Luminosity upgrade of the Large Hadron Collider (HL-LHC), the ATLAS experiment is replacing its current Inner Detector with a new all-silicon Inner Tracker (ITk). The ITk will feature an active area of 165 m2, with its outer tracking layers populated by approximately 18,000 ATLAS18 n+-in-p silicon strip sensors. The silicon sensors, available in eight geometries tailored to two barrel and six endcap types, respectively, are designed to tolerate fluences of up to 1.6 x 10^15 neq/cm2 and ionizing doses of 66 Mrad. A comprehensive, multi-year Quality Control (QC) program is underway across multiple international institutes to evaluate these ITk strip sensors for mechanical and electrical conformity. The QC process includes IV/CV characterization, full strip tests, long-term current stability monitoring, visual inspection, and metrology tests. To manage the high throughput of about 500 sensors per month, the collaboration has implemented standardized test procedures, software packages for data monitoring and integrity checks, unified data formats, and automated analysis tools. The standardization ensures consistent pass/fail evaluation and centralized data handling that enables effective identification of trends and anomalies at all sites during the production. This contribution presents an overview of the ITk strip sensor production and QC framework, along with key findings throughout the whole production, such as charge-up of sensors, stability of the leakage currents, nonrecoverable IV breakdown, and low inter-strip isolation within wafers. It provides insights into sensor yield, quality trends, and reviews specific case studies, such as p-stop doping non-uniformity. Over 91% of the production, totaling over 590 batches, were tested and accepted. Six batches were rejected. These account for 2.8% of the total tested sensors.
