AI 中文总结
研究利用电子束辐射分解辅助生长晶体薄膜，采用混合分子束外延技术，通过MBE腔内RHEED枪提供电子束照射TiO₂薄膜表面，在低温下生长晶体薄膜，可通过调节温度和剂量控制薄膜结晶度。
AI 中文摘要
开发了一种生长晶体薄膜的新方法，利用电子束辐射分解作为一种建设性力量将原子重排成晶体结构。证明在生长过程中通过MBE腔内的反射高能电子衍射（RHEED）枪提供的电子束照射TiO₂薄膜表面，可在低得多的衬底温度下生长晶体薄膜，通常沉积的薄膜在此温度下呈非晶态。使用混合分子束外延（MBE）生长金红石TiO₂薄膜，实现原子级生长控制和辐射分解驱动结晶的观察。通过SEM和原子分辨率STEM成像进行分析。还表明通过调节衬底温度和电子束剂量可控制薄膜的结晶度。
英文摘要
A new approach for growing crystalline thin films is developed that takes advantage of electron beam radiolysis being a constructive force to rearrange atoms into a crystalline structure. It is demonstrated that by irradiating the surface of a TiO2 film by an electron beam supplied by a reflection high energy electron diffraction (RHEED) gun inside the MBE chamber during growth, a crystalline film can be grown at much lower substrate temperatures, where deposited films typically appear amorphous. Here, rutile TiO2 films were grown using hybrid molecular beam epitaxy (MBE) allowing atomic level control of growth as well as an observation of radiolysis-driven crystallization. Analysis was carried out using a combination of SEM and atomic-resolution STEM imaging. It is also shown that by tuning the temperature of the substrate and the dose of the electron beam, the degree of crystallinity of the film can be controlled.
