基于Ga2O3的X射线探测器的关键考量：激发、载流子传输机制及性能标准化
A critical consideration of X-ray detectors based on Ga2O3: excitation, carrier transport mechanisms and performance standardization
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中文总结 AI 辅助
研究基于Ga2O3的X射线探测器，针对其载流子激发和传输机制未充分研究及性能基准测试有问题的状况，通过特定探测器开展研究，明确相关机制并进行性能基准测试，还提出了适用的测量与分析器件性能的协议。
中文摘要 AI 辅助
X射线检测在医学、安全、工业检测、无损成像和材料分析等众多应用中起着支撑作用。基于Ga2O3的X射线探测器凭借其高密度、宽带隙能量和高热化学稳定性等固有材料特性，为下一代高灵敏度、低噪声且适用于恶劣环境的探测器提供了一条有前景的途径。然而，包括载流子激发和传输过程在内的潜在器件运行机制尚未得到充分研究，主要是由于先前研究中对X射线源的误用。此外，由于实验或数据分析问题以及对与参数定义相关的应用方程的误解，器件特性的基准测试也存在问题。在这项工作中，我们基于外延β-Ga2O3:Si及其平面肖特基探测器设计并开展了一项有指导意义的研究工作，在同步加速器光束线上用能量可调的单色X射线束进行测量，明确了器件激发和载流子传输机制，并对器件性能进行了适当的基准测试。最后，我们提出了一套正确测量和分析器件性能的协议。所提出的协议具有广泛适用性，可轻松扩展到其他半导体X射线探测器。
英文摘要
X-ray detection underpins a wide range of applications in medicine, security, industrial inspection, scientific research for non-destructive imaging and material analysis. The rapid development of Ga2O3-based X-ray detectors offers a promising pathway toward next-generation detectors with high sensitivity, low noise, and harsh environment applications, benefiting from its intrinsic material properties such as high density, wide band gap energy, and high thermal-chemical stability. However, the underlying device operating mechanisms, including both carrier excitation and transport processes, have not yet been adequately studied, largely due to the misuse of X-ray sources in previous studies. Besides, benchmarking of device characteristics has been problematic due to experimental or data analysis issues, as well as misunderstandings of the applied equations associated with parameter definitions. In this work, we have designed and performed an instructive research work based on epitaxial beta-Ga2O3:Si and its planar Schottky detectors, measured with energy-tuneable monochromatic X-ray beams on a synchrotron beamline, clarifying the device excitation and carrier transport mechanisms with properly benchmarked device performance. In the end, we propose a set of protocols for correctly measuring and analysing the device performance. The proposed protocols are broadly applicable and can be readily extended to other semiconductor X-ray detectors.
