Integrated photonics is a powerful platform for exploring Hermitian and non-Hermitian physics. Beyond device geometry, controlling how resonators are driven is crucial to access and tailor their modes. Coherent excitation via multiple input ports (interferometric excitation) enables such control, but its accurate description requires extending standard temporal coupled-mode theory to include interference between excitation pathways. Experimental realizations have so far been limited by phase-unstable, off-chip interferometers. Here we implement a fully integrated, phase-stable interferometric excitation scheme for an infinity-loop microresonator, an established structure operating on an exceptional surface, and use it to test the extended theory. Phase-dependent measurements in the linear and thermo-optic nonlinear regimes show that the relative phase between inputs governs the intracavity energy distribution, enabling up to a twofold increase of the circulating power compared to single-port excitation. This integrated platform enables reproducible studies of phase-dependent effects and coherent-control schemes in non-Hermitian photonic devices.
Recent advances in the design and fabrication of on-chip optical microresonators has greatly expanded their applications in photonics, enabling metrology, communications, and on-chip lasers. Designs for these applications require fine control of dispersion, bandwidth and high optical quality factors. Co-engineering these figures of merit remains a significant technological challenge due to design strategies being largely limited to analytical tuning of cross-sectional geometry. Here, we show that photonic inverse-design facilitates and expands the functionality of on-chip microresonators; theo…
Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical resonances in an integrated manner. Here, we design and experimentally demonstrate integrated on-chip thermo-optic tuning of suspended microresonators by utilizing suspended wire bridges and microheaters. We demonstrate the ability to tune the resonance of a suspended microresonator in silicon nitride platform by 9.7 GHz using 5.3 mW of heater power. The loaded opti…
We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First two metallic microelectrodes on the substrate were formed via femtosecond laser process. Then a high-Q lithium niobate microresonator located between the microelectrodes was fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Due to the efficient structure designing, high electro-optical tuning coefficient of 3.41 pm/V was observed.
We report on fabrication of a microtoroid resonator of high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3D) micromachining. The microheater, which is located about 200 micron away from the microresonator, has a footprint size of 200 micron by 400 micron. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The drifting of the resonant wavelength shows a linear dependence on the square of the voltage applied…
Microresonators (MRs) are key components in integrated optics. As a result, the estimation of their energy storage capacity as measured by the quality factor (Q) is crucial. However, in MR with high/ultra-high Q, the surface-wall roughness dominates the intrinsic Q and generates a coupling between counter-propagating modes. This splits the usual sharp single resonance and makes difficult the use of classical methods to assess Q. Here, we theoretically show that an interferometric excitation can be exploited in a Cavity Ring-Down (CRD) method to measure the ultimate Q of a MR. In fact, under su…
We stabilize a chip-scale Si3N4 phase-locked Kerr frequency comb via locking the pump laser to an independent stable high-Q reference microresonator and locking the comb spacing to an external microwave oscillator. In this comb, the pump laser shift induces negligible impact on the comb spacing change. This scheme is a step towards miniaturization of the stabilized Kerr comb system as the microresonator reference can potentially be integrated on-chip. Fractional instability of the optical harmonics of the stabilized comb is limited by the microwave oscillator used for comb spacing lock below 1…
Nonlinear optical processes in whispering gallery mode (WGM) microresonators have attracted much attention. Owing to the strong confinement of light in a small volume, a WGM microresonator can dramatically boost the strength of light field, thereby promoting the nonlinear interaction between the light and the resonator material. However, realization of efficient nonlinear parametric process in microresonators is a challenging issue. The major difficulty is to simultaneously ensure the phase matching condition and a coherent multiple resonance condition for all the waves participating in the no…
High spectral purity frequency agile room temperature sources in the terahertz spectrum are foundational elements for imaging, sensing, metrology, and communications. Here we present a chip scale optical parametric oscillator based on an integrated nonlinear microresonator that provides broadly tunable single frequency and multi frequency oscillators in the terahertz regime. Through optical to terahertz down conversion using a plasmonic nanoantenna array, coherent terahertz radiation spanning 2.8 octaves is achieved from 330 GHz to 2.3 THz, with 20 GHz cavity mode limited frequency tuning step…
A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whispering gallery modes (WGMs), the PDMS-coated microresonator is highly sensitive to the temperature change of the surroundings. We find that, when the PDMS layer becomes thicker, the WGM experiences a transition from red- to blue-shift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica …
Control of dispersion in fibre optical waveguides is of critical importance to optical fibre communications systems and more recently for continuum generation from the ultraviolet to the mid-infrared. The wavelength at which the group velocity dispersion crosses zero can be set by varying fibre core diameter or index step. Moreover, sophisticated methods to manipulate higher-order dispersion so as shape and even flatten dispersion over wide bandwidths are possible using multi-cladding fibre. Here we introduce design and fabrication techniques that allow analogous dispersion control in chip-int…
We have experimentally demonstrated an on-chip all-silk fibroin whispering gallery mode microresonator by using a simple molding and solution-casting technique. The quality factors of the fabricated silk protein microresonators are up to 10^5. A high-sensitivity thermal sensor was realized in this silk fibroin microtoroid with sensitivity of 1.17 nm/K, 8 times higher than previous WGM resonator based thermal sensors. This opens the way to fabricate biodegradable and biocompatible protein based microresonators on a flexible chip for biophotonics applications.
We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of 2.5x10^5 around 1550 nm wavelength range. Moreover, second harmonic generation with a continuous-wave tunable single-longitudinal-mode pump laser in the on-chip LN microresonator is demonstrated in the on-chip LN microresonator. A fiber taper is employed to couple the pump laser into the microresonator, showing a normalized conversion efficiency of 1.…
Simultaneous Kerr comb formation and second-harmonic generation with on-chip microresonators can greatly facilitate comb self-referencing for optical clocks and frequency metrology. Moreover, the presence of both second- and third-order nonlinearities results in complex cavity dynamics that is of high scientific interest but is still far from well understood. Here, we demonstrate that the interaction between the fundamental and the second-harmonic waves can provide an entirely new way of phase-matching for four-wave mixing in optical microresonators, enabling the generation of optical frequenc…
We report, for the first time to the best of our knowledge, spectral phase characterization and line-by-line pulse shaping of an optical frequency comb generated by nonlinear wave mixing in a microring resonator. Through programmable pulse shaping the comb is compressed into a train of near-transform-limited pulses of \approx 300 fs duration (intensity full width half maximum) at 595 GHz repetition rate. An additional, simple example of optical arbitrary waveform generation is presented. The ability to characterize and then stably compress the frequency comb provides new data on the stability …
The phenomenon of synchronization occurs universally across the natural sciences and provides critical insight into the behavior of coupled nonlinear dynamical systems. It also offers a powerful approach to robust frequency or temporal locking in diverse applications including communications, superconductors, and photonics. Here we report the experimental synchronization of two coupled soliton modelocked chip-based frequency combs separated over distances of 20 m. We show that such a system obeys the universal Kuramoto model for synchronization and that the cavity solitons from the microresona…
Optical parametric oscillation (OPO) is distinguished by its wavelength access, that is, the ability to flexibly generate coherent light at wavelengths that are dramatically different from the pump laser, and in principle bounded solely by energy conservation between the input pump field and the output signal/idler fields. As society adopts advanced tools in quantum information science, metrology, and sensing, microchip OPO may provide an important path for accessing relevant wavelengths. However, a practical source of coherent light should additionally have high conversion efficiency and high…
Chalcogenide glass (ChG) is an attractive material for integrated nonlinear photonics due to its wide transparency and high nonlinearity, and its capability of being directly deposited and patterned on Silicon wafer substrates. It has a singular Raman effect among amorphous materials. Yet, the Raman lasing performance in high quality and chip integrated ChG microresonators remains unexplored. Here, we demonstrate an engineered Raman lasing dynamic based on home developed photonic integrated high-Q ChG microresonators. With a quality factor above 10^6, we achieve the record-low lasing threshold…
The ability to detect and size individual nanoparticles with high resolution is crucial to understanding behaviours of single particles and effectively using their strong size-dependent properties to develop innovative products. We report real-time, in-situ detection and sizing of single nanoparticles, down to 30 nm in radius, using mode-splitting in a monolithic ultra-high-Q whispering-gallery-mode (WGM) microtoroid resonator. Particle binding splits a WGM into two spectrally shifted resonance modes, forming a self-referenced detection scheme. This technique provides superior noise suppressio…
Quantum frequency combs from chip-scale integrated sources are promising candidates for scalable and robust quantum information processing (QIP). However, to use these quantum combs for frequency domain QIP, demonstration of entanglement in the frequency basis, showing that the entangled photons are in a coherent superposition of multiple frequency bins, is required. We present a verification of qubit and qutrit frequency-bin entanglement using an on-chip quantum frequency comb with 40 mode pairs, through a two-photon interference measurement that is based on electro-optic phase modulation. Ou…
Non-Hermitian physics has found a fertile ground in optics. Recently, the study of mode degeneracies, i.e. exceptional points, has led to the discovery of intriguing and counterintuitive phenomena. Degeneracies are typically modeled through the coupled mode theory to determine the behaviour of eigenstates and eigenvalues. However, the complex nature of the eigenvalues makes hard their direct characterization from the response spectrum. Here, we demonstrate that a coherent interferometric excitation allows estimating both the real and imaginary parts of the eigenvalues. We studied the clockwise…
In nonlinear microresonators driven by continuous-wave (cw) lasers, Turing patterns have been studied in the formalism of Lugiato-Lefever equation with emphasis on its high coherence and exceptional robustness against perturbations. Destabilization of Turing pattern and transition to spatio-temporal chaos, however, limits the available energy carried in the Turing rolls and prevents further harvest of their high coherence and robustness to noise. Here we report a novel scheme to circumvent such destabilization, by incorporating the effect of local mode hybridizations, and attain globally stabl…
We describe the generation of stable mode-locked pulse trains from on-chip normal dispersion microresonators. The excitation of hyper-parametric oscillation is facilitated by the local dispersion disruptions induced by mode interactions. The system is then driven from hyper-parametric oscillation to the mode-locked state with over 200 nm spectral width by controlled pump power and detuning. With the continuous-wave driven nonlinearity, the pulses sit on a pedestal, akin to a cavity soliton. We identify the importance of pump detuning and wavelength-dependent quality factors in stabilizing and …
We demonstrate fully crystalline, single-mode ultrahigh quality factor integrated microresonators comprising epitaxially grown Si$_{0.86}$Ge$_{0.14}$ waveguide cores with silicon claddings. These waveguides support resonances with internal $Q >10^8$ for both polarization modes, a nearly order-of-magnitude improvement over that seen in prior integrated Si photonics platforms. The maximum $Q$ is $1.71\pm0.06 \times 10^8$ for the transverse magnetic (TM) polarization mode, corresponding to a loss of $0.39\pm0.02$ dB/m. Together with silicon's strong Kerr nonlinearity and low losses in the optical…
The generation of dissipative Kerr solitons in optical microresonators has provided a route to compact frequency combs of high repetition rate, which have already been employed for optical frequency synthesizers, ultrafast ranging, coherent telecommunication and dual-comb spectroscopy. Silicon nitride (Si$_3$N$_4$) microresonators are promising for photonic integrated soliton microcombs. Yet to date, soliton formation in Si$_3$N$_4$ microresonators at electronically detectable repetition rates, typically less than 100 GHz, is hindered by the requirement of external power amplifiers, due to the…
Carrier-envelope phase stabilization of optical pulses enables exquisitely precise measurements by way of direct optical-frequency synthesis, absolute optical-to-microwave phase conversion, and control of ultrafast waveforms. We report such phase stabilization for Kerr-microresonator frequency combs integrated on silicon chips, and verify their fractional-frequency inaccuracy at <3x10-16. Our work introduces an interlocked Kerr-comb configuration comprised of one silicon-nitride and one silica microresonator, which feature nearly harmonic repetition frequencies and can be generated with one la…
Optical frequency combs have revolutionized the field of frequency metrology within the last decade and have become enabling tools for atomic clocks, gas sensing and astrophysical spectrometer calibration. The rapidly increasing number of applications has heightened interest in more compact comb generators. Optical microresonator based comb generators bear promise in this regard. Critical to their future use as 'frequency markers', is however the absolute frequency stabilization of the optical comb spectrum. A powerful technique for this stabilization is self-referencing, which requires a spec…
Bringing efficient second-order nonlinear effects in integrated photonics is an important task motivated by the prospect of enabling all possible optical functionalities on chip. Such task has proved particularly challenging in silicon photonics, as materials best suited for photonic integration lack second-order susceptibility ($χ^{(2)}$). Methods for inducing effective $χ^{(2)}$ in such materials have recently opened new opportunities. Here, we present optically reconfigurable quasi-phase-matching in large radius Si$_3$N$_4$ microresonators resulting in mW level on-chip second-harmonic gener…
In recent years, microresonator-based optical frequency combs have created up opportunities for developing a spectroscopy laboratory on a chip due to its broadband emission and high comb power. However, with mode spacings typically in the range of 10 - 1000 GHz, the realization of a chip-based high-resolution spectrometer suitable for gas-phase spectroscopy has proven to be difficult. Here, we show mode-hop-free tuning of a microresonator-based frequency comb over 16 GHz by simultaneously tuning both the pump laser and the cavity resonance. We illustrate the power of this scanning technique by…
Soliton microcombs constitute chip-scale optical frequency combs, and have the potential to impact a myriad of applications from frequency synthesis and telecommunications to astronomy. The requirement on external driving lasers has been significantly relaxed with the demonstration of soliton formation via self-injection locking of the pump laser to the microresonator. Yet to date, the dynamics of this process has not been fully understood. Prior models of self-injection locking were not able to explain sufficiently large detunings, crucial for soliton formation. Here we develop a theoretical …
We propose a device architecture capable of direct quantum electro-optical conversion of microwave to optical photons. The hybrid system consists of a planar superconducting microwave circuit coupled to an integrated whispering-gallery-mode microresonator made from an electro-optical material. We show that electro-optical (vacuum) coupling rates $g_0$ as large as$\sim 2π\, \mathcal{O}(10-100)$ kHz are achievable with currently available technology, due to the small mode volume of the planar microwave resonator. Operating at millikelvin temperatures, such a converter would enable high-efficienc…
Microresonators on a photonic chip could enhance nonlinear optics effects, thus are promising for realizing scalable high-efficiency frequency conversion devices. However, fulfilling phase matching conditions among multiple wavelengths remains a significant challenge. Here, we present a feasible scheme for degenerate sum-frequency conversion that only requires the two-mode phase matching condition. When the drive and the signal are both near resonance to the same telecom mode, an efficient on-chip photon-number conversion efficiency upto 42% was achieved, showing a broad tuning bandwidth over …
Integrated optics has distinct advantages for applications in space because it integrates many elements onto a monolithic, robust chip. As the development of different building blocks for integrated optics advances, it is of interest to answer the important question of their resistance with respect to ionizing radiation. Here we investigate effects of proton radiation on high-Q silicon nitride microresonators formed by a waveguide ring. We show that the irradiation with high-energy protons has no lasting effect on the linear optical losses of the microresonators.
Thermodynamic noise places a fundamental limit on the frequency stability of dielectric optical resonators. Here, we present the characterization of thermo-refractive noise in photonic-chip-based silicon nitride microresonators and show that thermo-refractive noise is the dominant thermal noise source in the platform. We employed balanced homodyne detection to measure the thermo-refractive noise spectrum of microresonators of different diameters. The measurements are in good agreement with theoretical models and finite element method simulations. Our characterization sets quantitative bounds o…
By continuous wave pumping of a dispersion engineered, planar silicon nitride microresonator, continuously circulating, sub-30fs short temporal dissipative solitons are generated, that correspond to pulses of 6 optical cycles and constitute a coherent optical frequency comb in the spectral domain. Emission of soliton induced Cherenkov radiation caused by higher order dispersion broadens the spectral bandwidth to 2/3 of an octave, sufficient for self referencing, in excellent agreement with recent theoretical predictions and the broadest coherent microresonator frequency comb generated to date.…
The counting and control of optical cycles of light has become common with modelocked laser frequency combs. But even with advances in laser technology, modelocked laser combs remain bulk-component devices that are hand-assembled. In contrast, a frequency comb based on the Kerr-nonlinearity in a dielectric microresonator will enable frequency comb functionality in a micro-fabricated and chip-integrated package suitable for use in a wide-range of environments. Such an advance will significantly impact fields ranging from spectroscopy and trace gas sensing, to astronomy, communications, atomic t…
We propose to produce five-partite entanglement via cascaded four-wave mixing in a high-Q microresonator that may become a key to future one-way quantum computation on chip. A theoretical model is presented for the underlying continuous-variable entanglement among the generated comb modes that is expansible to more complicated scenarios. We analyze the entanglement condition when the van Loock and Furusawa criteria are violated, and discuss the device parameters for potential experimental realization that may be utilized to build an integrated compact five-partite entanglement generator. The p…
Optical frequency combs represent a revolutionary technology for high precision spectroscopy due to their narrow linewidths and precise frequency spacing. Generation of such combs in the mid-infrared (IR) spectral region (2-20 um) is of great interest due to the presence of a large number of gas absorption lines in this wavelength regime. Recently, frequency combs have been demonstrated in the MIR in several platforms, including fiber combs, mode-locked lasers, optical parametric oscillators, and quantum cascade lasers. However, these platforms are either relatively bulky or challenging to int…
Nonlinear optical effects have been studied extensively in microresonators as more photonics applications transition to integrated on-chip platforms. Due to low optical losses and small mode volumes, microresonators are demonstrably the state-of-the-art platform for second harmonic generation (SHG). However, the working bandwidth of such microresonator-based devices are relatively small, presenting a challenge for applications where a specifically targeted wavelength needs to be addressed. In this work, we analyzed the phase-matching window and resonance wavelength with respect to varying micr…
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline material…
Photonic integrated microcombs have enabled advanced applications in optical communication, microwave synthesis, and optical metrology, which in nature unveil an optical dissipative soliton pattern under cavity-enhanced nonlinear processes. The most decisive factor of microcombs lies in the photonic material platforms, where materials with high nonlinearity and in capacity of high-quality chip integration are highly demanded. In this work, we present a home-developed chalcogenide glasses-Ge25Sb10S65 (GeSbS) for the nonlinear photonic integration and for the dissipative soliton microcomb genera…
Dissipative Kerr-microresonator soliton combs (hereafter called soliton combs) are promising to realize chip scale integration of full soliton comb systems providing high precision, broad spectral coverage and a coherent link to the micro/mm/THz domain with diverse applications coming on line all the time. However, the large soliton comb spacing hampers some applications. For example, for spectroscopic applications, there are simply not enough comb lines available to sufficiently cover almost any relevant absorption features. Here, we overcome this limitation by scanning the comb mode spacing …
The recent advancement in lithium niobate on insulator (LNOI) technology is revolutionizing the optoelectronic industry as devices of higher performance, lower power consumption, and smaller footprint can be realized due to the high optical confinement in the structures. The LNOI platform offers both large \c{hi}(2) and \c{hi}(3) nonlinearities along with the power of dispersion engineering, enabling brand new nonlinear photonic devices and applications towards the next generation of integrated photonic circuits. However, the Raman scattering, one of the most important nonlinear phenomena, hav…
Phase coherently linking optical to radio frequencies with femtosecond mode-locked laser frequency combs enabled counting the cycles of light and is the basis of optical clocks, absolute frequency synthesis, tests of fundamental physics, and improved spectroscopy. Using an optical microresonator frequency comb to establish a coherent link between optical and microwave frequencies will extend optical frequency synthesis and measurements to areas requiring compact form factor, on chip integration and comb line spacing in the microwave regime, including coherent telecommunications, astrophysical …
