微波背景辐射和远红外背景辐射的极化和光谱畸变研究进展：芯片上超导积分场单元的制造
Advances in the Fabrication of On-chip Superconducting Integral Field Units for CMB and Line-Intensity Astronomy
AI总结：
研究微波背景辐射和远红外背景辐射的极化和光谱畸变，利用芯片上超导光谱仪技术实现高效大范围观测，提出新型芯片组件和制造工艺以提升光谱和偏振测量性能。
摘要：
研究微波背景辐射（CMB）的极化和光谱畸变以及远红外背景辐射（CIB）的强度波动，有助于验证宇宙膨胀理论并研究过去100亿年内星系团的动力学和演化。由于其宽带发射和全天空扩展特性，详细观测CMB非常耗时且昂贵。幸运的是，近年来芯片上超导光谱仪技术已从实验室进入望远镜应用。其紧凑尺寸和背景限制灵敏度使其特别适合在电磁波谱相对较未探索的范围内进行快速和大区域观测。然而，近期此类技术尚未达到CMB大规模光谱和偏振测量调查所需性能。我们提出了一些这些要求，并引入了新型芯片组件和制造技术。我们引入了交叉结构以区分信号极化，通过局部优化的平面波导（CPW）光刻工艺减少信号损耗，通过沉积介电层降低微带滤波器的光谱分辨率，并通过去除个别线短路提高光谱仪阵列的产量。这些共同促成了十四像素积分场单元（IFU）的成功制造。
英文摘要：
Studying the polarization and spectral distortion of the Cosmic Microwave Background (CMB) in tandem with intensity fluctuations of the Cosmic Infrared Background (CIB) allows us to verify our assumptions on cosmic inflation and investigate the dynamics and evolution of galaxy clusters in the last 10 billion years. Because of its broadband emission and being an all-sky extended source, observing the entire CMB in detail is a very time-consuming and expensive exercise. Fortunately, in the last few years, the on-chip superconducting spectrometer technology has moved out of the lab and into the telescope. With its compact size and background-limited sensitivity, this family of instruments is particularly well-suited for fast and large area observations in a relatively unexplored range of the electromagnetic spectrum. However, recent examples of this technology do not yet reach the requirements needed for large spectroscopic and polarimetric surveys of the CMB. We formulate several of these requirements and introduce novel on-chip components and fabrication techniques. We introduce a cross-over to enable distinguishing signal polarization, minimize signal loss by locally optimized lithography of a coplanar-waveguide (CPW), lower the spectral resolution of microstrip filters by deposition of a dielectric layer, and increase the yield of the spectrometer array by removing individual line shorts. These together have culminated in the successful fabrication of a fourteen-spaxel IFU.
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