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arXiv 2603.04853physics.optics
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亚衍射激光刻写中的随机机制

Stochastic inner workings of subdiffraction laser writing

Princeton University(普林斯顿大学);Texas A&M University(德克萨斯农工大学)

Julia M. Mikhailova, Aleksei M. Zheltikov

AI总结:

研究通过统计光学方法揭示了亚衍射激光刻写中确定性与随机性相互作用的物理机制,并探讨了其对量子光子系统可扩展性的限制。

摘要:

在宽禁带半导体中超快激光刻写单晶格缺陷已被展示为一种新的物理场景,在其中可以实现深亚波长激光刻写定位精度,但其中整个定位概念只能以统计意义来理解。我们概述了一个分析此类激光-物质相互作用的框架,将光学超分辨率和亚衍射定位的概念根植于统计光学中。沿着这些思路,我们推导出物理上意义明确的激光-物质相互作用量在亚波长尺度上的闭式解,表明如何通过确定性和随机性之间的相互作用产生深亚衍射分辨率。我们证明在单晶格缺陷激光刻写中亚衍射定位精度的实现是以较低的吞吐量为代价的,从而为通过超分辨激光刻写制造的集成量子光子系统可扩展性设定了物理限制。

英文摘要:

Ultrafast laser writing of single lattice defects in wide-bandgap semiconductors is shown to present a new physical setting in which deeply subwavelength laser-writing positioning precision is attainable, but where the whole notion of positioning can only be understood in a statistical sense. We outline a framework for the analysis of this class of laser - matter interactions, grounding the concepts of optical super-resolution and subdiffraction positioning in statistical optics. Working along these lines, we derive closed-form solutions for physically meaningful quantifiers of laser-matter interactions on a subwavelength scale, suggesting a physically clear view of how deeply subdiffraction resolution can emerge from the interplay between determinism and stochasticity. We show that subdiffraction positioning precision in single-lattice-defect laser writing is achieved at the cost of a lower throughput, setting physical bounds on the scalability of integrated quantum photonic systems fabricated by means of super-resolving laser writing.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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