原子探针在非金属材料中的成分计量学
Compositional Metrology of Atom Probe Applied to non-Metallic Materials
AI总结：
本文介绍激光辅助原子探针层析技术（LA-APT）在非金属材料成分测量中的原理、偏差来源及校正方法，总结当前研究现状并提出最佳实践建议。
摘要：
激光辅助原子探针层析技术（LA-APT）在研究半导体材料和器件以及越来越多的无机非金属固体中原子种类的三维分布方面展现出独特的潜力。APT在非金属体系成分测量中的准确性是一个关键且常被低估的问题。本文介绍了APT作为实验技术的原理，回顾了可能导致成分偏差的方面，特别强调了表面电场在控制实现测量的不同物理化学现象中的作用。它回顾了特定损失的可能的机制，以及评估成分偏差的方法并提出了可能的校正方法。最后，它建立了非金属材料APT成分偏差的当前技术水平，在此基础上可以得出关于最佳实践的具体建议，以及APT应用于新材料的展望。
英文摘要：
Laser-assisted Atom Probe Tomography (LA-APT) has demonstrated a unique potential for the study of the 3D distribution of atomic species in semiconductor materials and devices, and in a growing list of inorganic non-metallic solids. A crucial and often underestimated issue with APT is its accuracy in compositional measurements of non-metallic systems. This work introduces the principles of APT as an experimental technique, recalling the aspects potentially leading to compositional biases and underlining in particular the role of the surface electric field in governing the different physical-chemical phenomena that enable the measurement. It reviews the possible mechanisms of specific losses, as well as the methods for assessing a compositional bias and proposing possible correction methods. Finally, it establishes a state of the art on compositional biases in APT of non-metallic materials, on the basis of which it will be possible to conclude on specific recommendations for best practices, and the perspective of application of APT to new materials.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
