通过硅基底上的单晶β-氧化镓膜实现可扩展的太阳盲成像
Scalable Solar-Blind Imaging Enabled by Single-Crystalline Beta-Ga2O3 Membranes on Silicon Backplanes
AI总结：
本研究通过单晶β-氧化镓膜和缝合组装策略，实现高分辨率、高速度的太阳盲紫外成像系统。
摘要：
宽禁带半导体因其固有的低噪声和高光谱选择性，对太阳盲紫外（UV）检测具有吸引力，但其在大面积、高密度电子成像系统中的应用仍受限于材料质量、器件速度与高密度平面硅读出电路之间的根本性权衡。本文报道了一种基于可转移单晶β-氧化镓的膜增强集成平台，克服了这些限制。通过利用β-氧化镓（100）平面的弱层间键合，我们获得了晶圆级自由悬挂单晶膜，实现了具有亚微秒非持久光电响应和高紫外-可见波段排斥的垂直集成光电二极管。关键在于我们引入了一种基于缝合的膜组装策略，将阵列分辨率与源单晶基板尺寸解耦，允许在硅薄膜晶体管基底上集成高分辨率光电探测器阵列。模块化组装的主动矩阵紫外成像阵列表现出均匀的太阳盲响应，无图像滞后，与基于非晶或多晶薄膜的阵列形成鲜明对比。除了β-氧化镓外，这种膜增强和基于缝合的模块化集成策略为利用可转移单晶半导体实现高速、高分辨率电子成像系统提供了通用途径。
英文摘要：
Ultrawide-bandgap semiconductors are attractive for solar-blind ultraviolet (UV) detection owing to their intrinsically low noise and high spectral selectivity, yet their deployment in large-area, high-density electronic imaging systems remains limited by a fundamental trade-off between material quality, device speed, and compatibility with high-density planar silicon readout circuits. Here, we report a membrane-enabled integration platform based on transferable single-crystalline beta-Ga2O3 that overcomes these constraints at the system level. By exploiting the weak interplanar bonding of beta-Ga2O3 (100) plane, we obtain wafer-scale freestanding single-crystalline membranes that enable vertically integrated photodiodes with sub-microsecond, non-persistent photoresponse and high UV-visible rejection. Crucially, we introduce a stitching-based membrane assembly strategy that decouples array resolution from the size of the source single-crystalline substrate, allowing high-resolution photodetector arrays to be integrated onto silicon thin-film-transistor backplanes. The modular assembled active-matrix UV imaging arrays exhibit uniform solar-blind response without image lag, in stark contrast to arrays based on amorphous or polycrystalline films. Beyond beta-Ga2O3, this membrane-enabled and stitching-based modular integration strategy provides a general route toward high-speed, high-resolution electronic imaging systems using transferable single-crystalline semiconductors.
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