纳米级线框SQUID在悬臂上通过角落光刻技术实现
Nanoscale wireframe SQUID on a cantilever by corner lithography
AI总结：
通过角落光刻技术在悬臂顶端制作纳米级SQUID，实现可调磁通量调节和高磁场操作能力。
摘要：
我们展示了在自对准超导悬臂探针的顶端利用线框尖端制作纳米级超导量子干涉仪(SQUIDs)。这些探针是在硅晶圆上使用模塑技术结合角落光刻技术制成的，结果得到具有可调顶端结构的纳米线框尖端。通过使用磁控溅射的阴影效应沉积Nb，可以在悬臂上实现自对准的超导线框及其伴随的器件电路。利用聚焦离子束纳米图案化在线框顶端实现超导弱连接。实现的SQUIDs的有效直径范围从数微米降至100纳米，并可在高达1T的磁场中运行。此外，线框中的纳米线可用于局部调节SQUID的磁通量。这种制造工艺使能够生产基于尖端超导器件的晶圆级模板。
英文摘要：
We present the fabrication of nanoscale superconducting quantum interference devices (SQUIDs) at the apex of wireframe tips on self-aligned superconducting cantilever probes. The probes are made on silicon wafers using molding techniques in combination with corner lithography, which results in a nanowire frame tip with a tuneable apex structure. A shadow effect deposition using magnetron sputtering of Nb creates self-aligned superconducting wireframes on cantilevers with accompanying device circuitry. Superconducting weak links are realized at the apex of the wireframes with the use of focused ion beam nanopatterning. The realized SQUIDs have effective diameters ranging from several micrometers down to 100 nm and can be operated in magnetic fields up to 1 T. Furthermore, the nanowires in the wireframe can be used to flux modulate the SQUID locally. This fabrication process enables the production of wafer-scale templates for probes based on on-tip superconducting devices.
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