基于单片直接电子探测器的能谱分辨EBSD
Energy-Resolved EBSD using a Monolithic Direct Electron Detector
AI总结：
本研究提出基于单片直接电子探测器的能谱分辨EBSD方法，通过单电子水平能量测定提升EBSD的定量能力，揭示Kikuchi带边缘的细微调制并优化图案清晰度。
摘要：
准确量化贡献于电子背散射衍射（EBSD）图案的背散射电子（BSEs）能谱仍是一个活跃的挑战。本研究介绍了一种基于单片主动像素传感器直接电子探测器和电子计数算法的能谱分辨EBSD方法，以实现对单个BSEs能量的量化，从而在衍射图案中直接测量电子能谱。在完成探测器信号随初级束能量变化的校准后，使用12 keV初级束在Si(100)上进行测量，发现衍射图案中BSEs能量分布广泛，延伸至3 keV以下。此外，观察到加权平均BSEs能量的角依赖性，与蒙特卡罗模拟预测非常吻合。像素分辨的能量图揭示了Kikuchi带边缘的细微调制，提供了关于背散射过程的见解。通过在以初级束能量为中心、宽度仅为2 keV的光谱窗口内应用能量过滤，显著提高了图案清晰度和高频细节。值得注意的是，9-10 keV范围的BSEs主导Kikuchi图案形成，而2-8 keV范围的BSEs尽管经历了显著的能量损失，仍能产生Kikuchi图案。通过在单个电子水平上实现能量确定，该方法引入了一种多功能工具集，以扩展EBSD的定量能力，从而为深入理解衍射对比机制和提高晶体学测量的精度提供了潜力。
英文摘要：
Accurate quantification of the energy distribution of backscattered electrons (BSEs) contributing to electron backscatter diffraction (EBSD) patterns remains as an active challenge. This study introduces an energy-resolved EBSD methodology based on a monolithic active pixel sensor direct electron detector and an electron-counting algorithm to enable the energy quantification of individual BSEs, providing direct measurements of electron energy spectra within diffraction patterns. Following detector calibration of the detector signal as a function of primary beam energy, measurements using a 12 keV primary beam on Si(100) reveal a broad BSE energy distribution across the diffraction pattern, extending down to 3 keV. Furthermore, an angular dependence in the weighted average BSE energy is observed, closely matching predictions from Monte Carlo simulations. Pixel-resolved energy maps reveal subtle modulations at Kikuchi band edges, offering insights into the backscattering process. By applying energy filtering within spectral windows as narrow as 2 keV centered on the primary beam energy, significant enhancement in pattern clarity and high-frequency detail is observed. Notably, BSEs in the 9--10 keV range dominate Kikuchi pattern formation, while BSEs in the 2--8 keV range, despite having undergone substantial energy loss, still produce Kikuchi patterns. By enabling energy determination at the single-electron level, this approach introduces a versatile tool-set for expanding the quantitative capabilities of EBSD, thereby offering the potential to deepen the understanding of diffraction contrast mechanisms and to advance the precision of crystallographic measurements.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
