通过结合FIB铣削和CO$_2$激光烧蚀制造定制化、低损耗光学谐振器
Fabrication of Customized, Low-Loss Optical Resonators by Combination of FIB-Milling and CO$_2$ Laser Ablation
AI总结：
该研究提出一种结合FIB铣削与CO$_2$激光平滑的新技术，用于制造定制化、低损耗的法布里-珀罗腔镜，实现纳米级精度和亚纳米表面粗糙度。
摘要：
法布里-珀罗腔是精密计量、光力学和量子技术等应用中的关键工具。一个主要挑战是制造微观球面镜结构，这些结构需要能够与高斯光束的波前精确匹配，同时提供高表面质量。我们提出了一种新颖的制造技术，通过结合聚焦离子束铣削（FIB）和CO$_2$激光平滑，能够在广泛的几何参数范围内制造定制化的微观腔镜结构。FIB铣削使我们能够在镜基底上以纳米级分辨率压印特征，而应用离焦的CO$_2$激光脉冲则持续地将剩余的表面变形减少到粗糙度$\sigma_\text{RMS}=0.2\\,$nm。轮廓与球形的平均偏差保持在几纳米以下。该技术能够在包括光纤在内的多种光学基底上实现定制化和可重复的低损耗光学器件制造。因此，可以制造具有预定义模体积、高精细度和定制椭圆度的法布里-珀罗腔。由于镜子的结构形状是通过FIB铣削创建的，其逐像素写入过程的特性可以用来创建任意结构，分辨率由FIB铣削决定。同时，表面质量由CO$_2$激光平滑过程保证，而不会降低FIB铣削的形状。
英文摘要：
Fabry-Perot cavities are essential tools for applications like precision metrology, optomechanics and quantum technologies. A major challenge is the creation of microscopic spherical mirror structures which allow the precise matching with the wavefront of a Gaussian beam, while providing high surface quality. We present a novel fabrication technique, enabling the creation of customized microscopic cavity mirror structures over a wide range of geometrical parameters, by combining focused ion beam milling (FIB) and CO$_2$ laser smoothing. While FIB milling allows us to imprint features on the mirror substrate with a resolution on the nanometer scale, the application of defocused CO$_2$ laser pulses consistently reduces remaining surface deformations down to a roughness of $σ_\text{RMS}=0.2\,$nm. The average deviation of the profile from a spherical shape is kept below a few nanometres. This technique enables the customized and repeatable fabrication of low loss optics on a wide range of optical substrates, including optical fibres. Thus, Fabry-Perot cavities can be fabricated with pre-defined modal volume, high finesse and tailored ellipticity. Since the structural shape of the mirror is created by FIB milling, its pixel-by-pixel nature of the writing process can be used to create arbitrary structures with a resolution given by the FIB milling. At the same time, the surface quality is given by the CO$_2$ laser smoothing processes, without degrading the FIB milled shape.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
