基于 PMMA 和热释放胶带的干法转移用于二维 TMDC 层的异质集成
Dry Transfer Based on PMMA and Thermal Release Tape for Heterogeneous Integration of 2D-TMDC Layers
AI总结：
提出一种结合 PMMA 与 TRT 的可扩展干法转移工艺，用于 MOCVD 生长的 2D-TMDC，实验证明其在洁净度、结构完整性及 FET 性能上优于 KOH 湿法转移。
摘要：
将 2D-TMDC（二维过渡金属硫族化合物）从生长衬底可靠且可扩展地转移到目标衬底，并具有高重复性和良率，是器件集成的关键步骤。在本工作中，我们提出了一种可扩展的干法转移方法，用于在蓝宝石上通过 MOCVD（金属有机化学气相沉积）生长的 2D-TMDC。向硅/二氧化硅（Si/SiO$_2$）衬底的转移分别使用 PMMA（聚甲基丙烯酸甲酯）和 TRT（热释放胶带）作为牺牲层和载体。我们提出的方法确保了从生长衬底上可重复地剥离，并在溶剂中去除 PMMA 期间更好地保护 2D-TMDC，同时不损害其与目标衬底的粘附性。对本工作提出的干法与基于氢氧化钾（KOH）溶液的标准湿法转移进行的全面比较表明，干法转移层在洁净度和结构完整性方面均有改善，这分别由 X 射线光电子能谱和拉曼光谱所证实。此外，所制备的场效应晶体管（FET）在亚阈值摆幅、最大漏极电流和器件间差异性方面均表现出改善。本工作开发的干法转移方法能够将 2D-TMDC 层高重复性地大面积集成到（光）电子元件中，同时更好地保留这些层的原生生长特性。
英文摘要：
A reliable and scalable transfer of 2D-TMDCs (two-dimensional transition metal dichalcogenides) from the growth substrate to a target substrate with high reproducibility and yield is a crucial step for device integration. In this work, we have introduced a scalable dry-transfer approach for 2D-TMDCs grown by MOCVD (metal-organic chemical vapor deposition) on sapphire. Transfer to a silicon/silicon dioxide (Si/SiO$_2$) substrate is performed using PMMA (poly(methyl methacrylate)) and TRT (thermal release tape) as sacrificial layer and carrier, respectively. Our proposed method ensures a reproducible peel-off from the growth substrate and better preservation of the 2D-TMDC during PMMA removal in solvent, without compromising its adhesion to the target substrate. A comprehensive comparison between the dry method introduced in this work and a standard wet transfer based on potassium hydroxide (KOH) solution shows improvement in terms of cleanliness and structural integrity for dry-transferred layer, as evidenced by X-ray photoemission and Raman spectroscopy, respectively. Moreover, fabricated field-effect transistors (FETs) demonstrate improvements in subthreshold slope, maximum drain current and device-to-device variability. The dry-transfer method developed in this work enables large-area integration of 2D-TMDC layers into (opto)electronic components with high reproducibility, while better preserving the as-grown properties of the layers.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
