基于傅里叶叠层显微术的超透镜高空间带宽积表征
High-space-bandwidth product characterization of metalenses with Fourier ptychographic microscopy
AI总结：
针对大NA大口径超透镜相位测量的高空间带宽积需求，提出基于傅里叶叠层显微术的相位表征技术，实现4.91兆像素高SBP测量，可分析加工像差并提供补偿策略，助力超透镜设计与工艺优化。
摘要：
大数值孔径（NA）、大口径超透镜在生物医学成像和天文成像领域展现出优异性能与丰富应用。然而，这类超透镜的相位测量需要满足高空间带宽积（SBP）要求，其特点是相位周期小、口径大，目前尚无有效技术可实现充分表征。本文提出一种采用傅里叶叠层显微术（FPM）的高SBP相位表征技术，可同时实现高空间分辨率与宽视场。为验证该技术的可行性与有效性，我们对聚焦超透镜和聚焦涡旋超透镜实现了4.91兆像素的高SBP测量与表征，定量展示了加工误差对其典型光学性能的影响。此外，我们表征了加工导致的波前偏差的像差类型与像差大小。我们还基于波前表征结果分析了不同像差的补偿方法，为优化光学系统整体性能提供了针对性的对准策略。我们认为，所提出的高SBP表征技术不仅有助于改进超透镜设计，还能优化其加工工艺，将为超透镜的多样化应用铺平道路。
英文摘要：
Large numerical aperture (NA) and large aperture metalenses have shown significant performance and abundant applications in biomedical and astronomical imaging fields. However, the high space-bandwidth product (SBP) requirements for measuring the phase of these metalenses, characterized by small phase periods and large apertures, have resulted in no effective techniques for sufficient characterization. In this paper, we propose a high SBP phase characterization technique using Fourier ptychographic microscopy (FPM), enabling a high spatial resolution and wide field of view simultaneously. To demonstrate the feasibility and effectiveness of this technique, we achieve a high SBP (4.91 megapixels) measurement and characterization for focusing and focusing vortex metalenses, quantitatively displaying the effect of fabrication error on their typical optical performance. Furthermore, we characterize the aberration type and amount of wavefront deviations caused by fabrication. We also analyze compensation methods for different aberrations based on the wavefront characterization results, providing a targeted alignment strategy for optimizing overall optical system performance. We believe that our high SBP characterization technique cannot only help to improve metalens design but also optimize its fabrication processing, which will pave the way for the diversified applications of metalenses.
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