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arXiv 2409.05071physics.optics
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用于CO2传感的混合金属-介质超表面高透射中红外带通滤光片

High-Transmission Mid-Infrared Bandpass Filters Using Hybrid Metal-Dielectric Metasurfaces for CO2 Sensing

Amr Soliman, C Williams, Richard Hopper, Florin Udrea, Haider Butt, Timothy D. Wilkinson

AI总结:

本文提出Ge-on-Al混合金属-介质超表面透射式MIR窄带滤光片,实现80%峰值透射与0.4 μm线宽,并用于CO2检测,检测限约0.04%。

摘要:

中红外(MIR)光谱是一种功能强大的技术,被用于多种应用,包括气体传感、工业检测、天文学、监视和成像。针对目标分子特定吸收波段的薄膜窄带干涉滤光片通常被部署用于具有成本效益的MIR传感系统。这些器件需要复杂且耗时的制造工艺。此外,面向新兴微型化应用在微尺度上对其进行定制具有挑战性。研究人员已经开发了在反射和透射模式下工作的等离子体纳米结构阵列用于MIR。然而,它们具有不理想的特性,例如宽光谱和较低的反射/透射效率。全介质超表面具有较低的本征损耗,并已成为MIR光谱中等离子体超表面的替代品。尽管如此,它们通常仅在反射模式下工作。在这项工作中,我们提出了一种用于在透射模式下工作的MIR光谱的混合金属-介质超表面。该超表面由位于铝(Al)圆柱体顶部的锗(Ge)组成,并且我们表明透射响应源于由Ge和Al结构产生的模式杂化。所提出的超表面在λ=2.6 μm处具有80%的高透射效率,以及0.4 μm的窄半高全宽。我们展示了数值模拟、使用一种简单制造方法的成功制备,以及其作为在线光学滤光片在CO2气体检测中的部署,其检测限约为0.04%(几百ppm)。我们的工作证明了混合超表面作为MIR光谱中在线气体传感光学滤光片的潜力。

英文摘要:

Mid-infrared (MIR) spectroscopy is a powerful technique employed for a variety of applications, including gas sensing, industrial inspection, astronomy, surveillance, and imaging. Thin-film narrowband interference filters, targeted to specific absorption bands of target molecules, are commonly deployed for cost-effective MIR sensing systems. These devices require complex and time-consuming fabrication processes. Also, their customization on the micro-scale for emerging miniaturized applications is challenging. Plasmonic nanostructure arrays operating in reflection and transmission modes have been developed for MIR. However, they experience undesirable characteristics, such as broad spectra and low reflection/transmission efficiencies. All-dielectric metasurfaces have low intrinsic losses and have emerged as a substitute for plasmonic metasurfaces in MIR spectroscopy. Nevertheless, they typically operate only in reflection mode. In this work, we present a hybrid metal-dielectric metasurface for MIR spectroscopy operating in transmission mode. The metasurface is composed of germanium (Ge) atop aluminum (Al) cylinders, and we show that the transmission response arises because of the hybridization of modes arising from the Ge and the Al structures. The presented metasurface has a high transmission efficiency of 80 % at $λ= 2.6\ μ\text{m}$, and a narrow full-width-at-half-maximum of $0.4\ μ\text{m}$. We show numerical simulations, successful fabrication using a straightforward fabrication method, and deployment as the in-line optical filter in a CO$_2$ gas detection with a limit of detection of ~0.04% (a few hundred ppm). Our work demonstrates the potential for hybrid metasurfaces as in-line gas sensing optical filters in MIR spectroscopy.

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